A wear-resistant and high-temperature resistant composite coating and its preparation method
A composite coating and high-temperature-resistant technology, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems that are difficult to meet the harsh application requirements, so as to prevent the existence of penetrating defects, enhance toughness, improve Effect of wear and high temperature properties
Active Publication Date: 2021-09-07
INST OF APPLIED PHYSICS JIANGXI ACADEMY OF SCI
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Problems solved by technology
Although this coating improves the high temperature resistance and wear resistance to a certain extent, with the continuous improvement of the energy level of equipment or parts, higher requirements are put forward for the performance of the coating. Coatings are no longer adequate for demanding applications
Method used
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Embodiment 1
[0051] (1) The substrate is cleaned, etched and transition layer deposited in sequence:
[0052] The substrate is washed and dried in degreasing agent, alcohol and acetone in turn, and then placed in a vacuum chamber;
[0053] The pressure of the vacuum chamber is 0.4 Pa, 42 sccm of argon gas is passed into the vacuum chamber, the current of the anode ion source is set to 0.25A, and the substrate is etched for 30 minutes with ionized argon ions;
[0054] Then use the arc ion plating technology to deposit Ti bottom layer, the target is Ti target, the arc source current is 75A, the substrate bias voltage is -110V, the Ar gas pressure is 1.0Pa, and the bottom layer deposition thickness is about 245nm; then the reaction gas N 2 , N 2 The air pressure is 4.2Pa, and the deposition thickness of the middle layer is about 741nm (the thickness ratio of the bottom layer to the middle layer is about 1:3);
[0055] (2) Using arc ion plating technology to alternately deposit MoNbTaTiZr la...
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Abstract
The invention provides a wear-resistant and high-temperature resistant composite coating, which comprises alternately stacked MoNbTaTiZr layers and Cr layers. 2 AlC layer. In the composite coating provided by the present invention, alternately stacked MoNbTaTiZr layers and Cr layers are used. 2 The AlC layer, in which the MoNbTaTiZr layer has the unique properties of refractory high-entropy alloys, ensures the wear resistance and high temperature performance of the coating, Cr 2 The AlC layer has a MAX phase, which is conducive to reducing the stress of the coating and enhancing the toughness. The multi-layer coating arranged alternately can block the penetrating growth of columnar crystals, prevent the existence of penetrating defects, and further improve the wear resistance and resistance of the coating. high temperature characteristics. The results of the examples show that the high temperature friction coefficient of the composite coating provided by the present invention is 0.48±0.08, and the hardness is about 43.21GPa.
Description
technical field [0001] The invention belongs to the technical field of metal surface coatings, and in particular relates to a wear-resistant and high-temperature resistant composite coating and a preparation method thereof. Background technique [0002] In the heavy industry, high-temperature reaction boilers, high-temperature heat exchange equipment and components working in high-temperature environments are often used. In order to reduce high-temperature damage and wear of equipment and components, the surface of these equipment and components is usually coated with coating. [0003] At present, coatings mainly include ceramic coatings and metal coatings. Ceramic materials are not easy to construct on-site, and are poorly matched with equipment or component materials, and are prone to shedding, which affects the effects of high temperature resistance and wear resistance, so metal coatings are usually used. For example, patent CN109280955A describes a high-temperature and...
Claims
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IPC IPC(8): C23C14/32C23C14/14C23C14/06C23C14/02C23C14/58
CPCC23C14/0021C23C14/022C23C14/0635C23C14/0641C23C14/14C23C14/325C23C14/5806
Inventor 魏仕勇万珍珍谌昀金莹谢仕芳汪爱英
Owner INST OF APPLIED PHYSICS JIANGXI ACADEMY OF SCI