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Monocrystalline silicon metasurface for realizing high-performance structural color and preparation method of monocrystalline silicon metasurface

A meta-surface and monocrystalline silicon technology, applied in the field of structural color, can solve the problems that the performance and application potential have not been fully utilized and verified, and it is difficult to meet the needs of multi-variety, small batch, personalization and rapid development, etc., to achieve improved Application value, high saturation effect

Inactive Publication Date: 2021-02-09
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL +1
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Problems solved by technology

[0011] To sum up, the existing display methods have been difficult to meet the needs of the rapidly developing information field for the multi-variety, small-batch, personalized and rapid development of metasurface light field control materials composed of micro-nano structures, and their performance and application potential have not been fully utilized. And verification

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  • Monocrystalline silicon metasurface for realizing high-performance structural color and preparation method of monocrystalline silicon metasurface
  • Monocrystalline silicon metasurface for realizing high-performance structural color and preparation method of monocrystalline silicon metasurface
  • Monocrystalline silicon metasurface for realizing high-performance structural color and preparation method of monocrystalline silicon metasurface

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[0037] The present invention will be further described below in conjunction with the description of the drawings and specific embodiments.

[0038] Such as Figure 1 to Figure 6 As shown, a monocrystalline silicon metasurface for achieving high-performance structural color is mainly composed of a monocrystalline silicon metasurface and an alumina substrate. layer, which greatly improves the vividness of the color. The monocrystalline silicon metasurface that realizes high-performance structural color can realize full medium wide color gamut, high saturation, high brightness and high-resolution structural color, and the preparation difficulty is low.

[0039] The present invention has designed a monocrystalline silicon metasurface, and simultaneously achieved a breakthrough in key performance parameters of color through a new method ( figure 1). From a material point of view, silicon materials are stable in nature and compatible with CMOS technology, meeting the requirements ...

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Abstract

The invention provides a monocrystalline silicon metasurface for realizing high-performance structural color, which comprises an aluminum oxide substrate and a monocrystalline silicon metasurface positioned on the aluminum oxide substrate, and the aluminum oxide substrate and the monocrystalline silicon metasurface are packaged by a refractive index matching layer. The invention also provides a preparation method of the monocrystalline silicon metasurface for realizing high-performance structural color. The single crystal silicon metasurface has the advantages that the single crystal silicon metasurface for realizing high-performance structural color is provided, wide color gamut, high brightness, high saturation and high resolution structural color can be achieved at the same time throughthe refractive index matching layer, the preparation difficulty is low, and the application value of the structural color is expanded and improved.

Description

technical field [0001] The invention relates to the field of structural color, in particular to a monocrystalline silicon supersurface for realizing high-performance structural color and a preparation method thereof. Background technique [0002] In recent years, with the continuous emergence of new materials and the continuous development of micro-nano processing and experimental detection methods, metasurfaces composed of artificial microstructures present a series of novel physical phenomena and great application potential. This makes the study of metasurfaces a common research hotspot in various disciplines. In the past three years, the use of metasurfaces to realize structural colors has gradually become the focus of development in the field. Metasurface structural color is a physical chromogenic effect formed by the interaction of micro-nano structures at the wavelength scale of visible light and light. [0003] The colors seen in nature can be divided into two catego...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/00G02B5/00
CPCG02B1/002G02B5/00
Inventor 肖淑敏杨文宏宋清海蔡定平
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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