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Coplanar stripline traveling wave electrode and silicon-based Mach-Zehnder modulator

A technology of coplanar striplines and traveling wave electrodes, which is applied in the fields of instruments, nonlinear optics, optics, etc., can solve the problems of large number of probes and large electrode area, so as to improve integration, reduce electrode area, increase The effect of large working bandwidth

Active Publication Date: 2021-02-19
CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When using differential electrodes to realize push-pull drive for the MZ modulator, both arms of the MZ modulator need to be energized and modulated at the same time, that is, two sets of coplanar waveguides and two GSG probes are required. When multiple MZ modulators are used to form a high When the order modulation is used, it leads to the problem of too many probes and too large electrode area

Method used

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  • Coplanar stripline traveling wave electrode and silicon-based Mach-Zehnder modulator
  • Coplanar stripline traveling wave electrode and silicon-based Mach-Zehnder modulator
  • Coplanar stripline traveling wave electrode and silicon-based Mach-Zehnder modulator

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Embodiment 1

[0032] The coplanar stripline traveling wave electrode described in the present invention has a broadband transition structure of coplanar waveguide-coplanar stripline, such as figure 1 As shown, the coplanar stripline traveling wave electrode includes a first ground line 1 , a signal line 2 , and a second ground line 3 .

[0033] The first ground line 1 includes a first ground access terminal 11 , a first transition section 12 , and a first traveling-wave electrode section 13 . The first transition section 12 is arranged between the first ground access end 11 and the first traveling-wave electrode section 13 .

[0034] The first ground wire 1 is located above the outer side of the first modulation arm 6, and its end is connected to a termination resistor 8 (50Ω);

[0035] The signal line 2 includes a signal access terminal 21 , a second transition section 22 , and a second traveling-wave electrode section 23 . The second transition section 22 is disposed between the signal ...

Embodiment 2

[0043] The silicon-based Mach-Zehnder modulator based on the coplanar stripline traveling wave electrode of the present invention includes:

[0044] The optical beam splitter 4 is used to divide the optical signal into two paths, which respectively enter the first modulation arm 6 and the second modulation arm 7,

[0045] an optical beam combiner 5, configured to combine the optical signals in the first modulation arm 6 and the second modulation arm 7;

[0046] Phase shifter 9, used to adjust the working bias point of the modulator;

[0047] The coplanar stripline traveling wave electrodes.

[0048] The optical beam splitter 4 adopts a multimode interferometer structure based on a strip waveguide, and the strip waveguide and the ridge waveguide used in the modulation arm are connected by a tapered flat transition zone to reduce optical mode loss;

[0049] The optical beam combiner 5 adopts a multimode interferometer structure based on a strip waveguide, and the strip wavegui...

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Abstract

The invention discloses a coplanar stripline traveling wave electrode and a silicon-based Mach-Zehnder modulator, the coplanar stripline traveling wave electrode is provided with a broadband transition structure of a coplanar waveguide coplanar stripline, and the coplanar stripline traveling wave electrode comprises a first ground wire, a signal wire and a second ground wire; a first earth pole access end, a signal access end, a second earth pole access end, a first transition section, a second transition section and a field dissipation transition section form a transition structure of a coplanar waveguide coplanar stripline; the first earth pole access end, the signal access end and the second earth pole access end form a coplanar waveguide structure; and by utilizing the coplanar stripline traveling wave electrode structure, single-ended push-pull driving can be realized by virtue of one group of traveling wave electrodes, the electrode area is reduced, the modulator is suitable forintegration of a plurality of modulators, and the integration level is improved.

Description

technical field [0001] The invention relates to the technical field of optoelectronic integration, in particular to a coplanar stripline traveling wave electrode and a silicon-based Mach-Zehnder modulator. Background technique [0002] With the rise of 5G services, the Internet of Everything, and high-definition video services, Internet data traffic has always maintained a rapid and steady growth trend. In addition, with the advent of the era of big data and cloud computing, the data traffic of data centers has also shown a blowout growth. Communication bandwidth becomes the main bottleneck of large-capacity data communication. Traditional electrical interconnection technology, whose information transmission speed and distance are limited by the RC time constant of copper medium and electrical loss, has the disadvantages of limited bandwidth, large transmission loss, delay, etc., and it is difficult to meet the increasing data transmission bandwidth and transmission rate. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/025G02F1/21
CPCG02F1/025G02F1/21Y02D30/70
Inventor 徐珍珠朱宇鹏高旭东曹继明崇毓华梅理
Owner CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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