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High Pumping Speed ​​Cryopump Resistant to Thermal Radiation

A heat radiation-resistant, low-temperature pump technology, which is applied to pumps, pump components, variable-capacity pump components, etc., can solve the problem that cryopumps cannot take into account heat radiation resistance and high pumping speed, and achieve heat radiation penetration and gas Good guiding effect, reduced heat radiation, and smooth movement channel

Active Publication Date: 2021-10-01
VACREE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is: the technical problem that the cryopump in the prior art cannot take into account the heat radiation resistance and the high pumping speed

Method used

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  • High Pumping Speed ​​Cryopump Resistant to Thermal Radiation
  • High Pumping Speed ​​Cryopump Resistant to Thermal Radiation
  • High Pumping Speed ​​Cryopump Resistant to Thermal Radiation

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Embodiment Construction

[0040] In order to make the objects, technical solutions, and advantages of the present invention, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it will be described in connection with the embodiment of the present invention. Embodiments, not all of the embodiments. Based on the embodiments of the present invention, those of ordinary skill in the art will belong to the scope of the present invention without all other embodiments obtained without creative labor.

[0041] like figure 1 As shown, a highly scattered low temperature pump of heat-resistant radiation includes a refrigerator 1, a housing 2, a first-stage cold plate 3, a secondary cold plate 4, a front baffle 5.

[0042] like figure 1 As shown, the cooling machine 1 is mounted on the cooling machine 2, the cold head 11 of the refrigerator 1 is located in the housing 2, and the cold head 11 provides a cold source for the low temperature...

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Abstract

The invention relates to the field of vacuum equipment, in particular to a heat-radiation-resistant high pumping speed cryogenic pump, which includes a refrigerator, a casing is installed on the refrigerator, and a cold head of the refrigerator is located in the casing; the cold head is provided with a first-stage Cold plate, secondary cold plate; the opening of the shell is provided with a front baffle, the heat radiation entering from the opening of the shell can pass through the front baffle and hit the shell to be reflected and absorbed, from the shell The gas entering through the opening of the body can be guided to the primary cold plate and the secondary cold plate by the front baffle. The advantage of the present invention is that: through the front baffle structure of this solution, the purpose of heat radiation and separation of gas molecules can be basically realized, thereby greatly reducing the heat radiation received by the cold plate of the cryopump, and because the gas movement channel is relatively smooth, Higher gas pumping speed can be achieved, so as to take into account the heat radiation resistance and high pumping speed.

Description

Technical field [0001] The present invention relates to the field of vacuum equipment, and more particularly to a large-scale low-temperature pump with heat-resistant radiation. Background technique [0002] The low temperature pump is a high vacuum pump widely used in the field of vacuum technology, which has a true oil-free cleansing characteristic based on low temperature condensation and low temperature adsorption principle. In the prior art, such as the disclosure of CN210013796U discloses a sustainable vacuum low temperature pump device, including three-way devices, two sets of low temperature pumps, two low temperature pumps by the first low temperature pump and the second The low temperature pump composition, the two channels in the three-way device Unicom communicate with a low-temperature pump, and both of the two channels are provided with a switching valve, and the remaining channel Unicom vacuum chamber in the three-way device is provided. The low-temperature pump de...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/08F04B39/12
CPCF04B37/08F04B39/121
Inventor 邓家良武义锋杨杨曾环程祥张海峰俞杰韩雨松
Owner VACREE TECH
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