Silicon-based rasterized grid terahertz detector based on frequency selective surface

A frequency selective surface, terahertz detector technology, applied in the field of terahertz detectors, to achieve the effects of small size, easy integration, and simple structure

Inactive Publication Date: 2021-03-02
TIANJIN UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

At the same time, currently limited by the frequency of terahertz light sources, terahertz detectors need to have a greater response to terahertz waves in certain frequency bands, so it is particularly important to design detectors with controllable frequencies

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  • Silicon-based rasterized grid terahertz detector based on frequency selective surface
  • Silicon-based rasterized grid terahertz detector based on frequency selective surface
  • Silicon-based rasterized grid terahertz detector based on frequency selective surface

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Embodiment Construction

[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0018] Such as Figure 1-4 As shown, the silicon-based grating grid terahertz detector based on the frequency selective surface of the present invention includes: a frequency selective surface and a MOS transistor of the grating grid, including NMOS and PMOS; the frequency selective surface, such as figure 1 As shown, it is a two-dimensional periodic array structure, which is essentially a spatial filter, and exhibits obvious band-pass or band-stop filtering characteristics when interacting with electromagnetic waves. figure 1 Each periodic unit in represents a frequency-selective surface unit with different functions. By changing the frequency-selective surface units of different s...

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Abstract

The invention discloses a silicon-based rasterized grid terahertz detector based on a frequency selective surface. The silicon-based rasterized grid terahertz detector comprises the frequency selective surface and a rasterized grid MOS transistor; the frequency selective surface is a spatial filter with an array structure formed by two-dimensional periodic units; each periodic unit represents a frequency selective surface unit with different effects; the grid electrode of the MOS tube of the rasterized grid electrode is of a grating structure, and the metal source electrode is connected with the active region through the through hole; and after the rasterized grid is coupled with space terahertz radiation, a space terahertz signal is converted into an alternating current signal and transmitted into a channel of the MOS transistor, and the transistor detects the alternating current signal in the channel, so that a direct current signal is generated at the drain, and terahertz signal detection is realized. According to the invention, the frequency selective surface can be well combined with the rasterized grid detector, and has higher gain response to terahertz waves of a specific frequency band.

Description

technical field [0001] The invention relates to the technical field of terahertz detectors, in particular to a silicon-based grating grid terahertz detector based on a frequency selective surface. Background technique [0002] Terahertz (THz) waves refer to electromagnetic waves (1THz=1012Hz) with an electromagnetic radiation frequency of 0.1-10THz (that is, a wavelength of 3mm-30μm), which is between the submillimeter wave and far-infrared band between microwave and infrared light. Due to less research and development, this band is also called THz gap. Terahertz waves have good penetrating ability and can penetrate most non-metallic materials such as plastics, wood, ceramics, and fur. At the same time, they will be absorbed or reflected by metals, drugs, explosives, etc. Therefore, they are mostly used in airport security checks and medical imaging. , astronomy, communication, biology, materials and other analysis. Compared with X-ray imaging, terahertz imaging is safer f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/119
CPCH01L31/119
Inventor 张新傅海鹏马凯学
Owner TIANJIN UNIV
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