Silicon-based rasterized grid terahertz detector based on frequency selective surface
A frequency selective surface, terahertz detector technology, applied in the field of terahertz detectors, to achieve the effects of small size, easy integration, and simple structure
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0018] Such as Figure 1-4 As shown, the silicon-based grating grid terahertz detector based on the frequency selective surface of the present invention includes: a frequency selective surface and a MOS transistor of the grating grid, including NMOS and PMOS; the frequency selective surface, such as figure 1 As shown, it is a two-dimensional periodic array structure, which is essentially a spatial filter, and exhibits obvious band-pass or band-stop filtering characteristics when interacting with electromagnetic waves. figure 1 Each periodic unit in represents a frequency-selective surface unit with different functions. By changing the frequency-selective surface units of different s...
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