Substrate clamp for vertical double-sided film coating

Abstract

The invention discloses a substrate clamp for vertical double-sided film coating. The substrate clamp for vertical double-sided film coating comprises a lower tray, an upper tray, a substrate, clamping devices and a main body bracket, wherein the clamping device is locked on the main body bracket, the substrate is clamped between the lower tray and the upper tray, and the substrate is clamped between the upper tray and the lower tray; the lower tray and the upper tray are clamped and attached through the clamping devices, hollowed-out sheet positions are arranged on the lower tray and the upper tray, the edges of the hollowed-out sheet positions extend outwards to be provided with edge stop blocks, the four corners of the hollowed-out sheet positions are provided with four-corner stop blocks, and trapezoidal bosses are arranged on the edges of a frame on the periphery of the upper tray; and trapezoidal grooves matched with the trapezoidal bosses are formed in the lower tray, and the substrate is limited in a narrow space in the middle by the edge stop blocks and the four-corner stop blocks. In this way, the phenomena of wafer falling and wafer inclining are not liable to happen; double-sided film coating with the maximum area is facilitated; a film coating shielding area is reduced, and a substrate film coating invalid area is reduced; and the clamping design of springs and baffles facilitates the realization of automatic mass production operation.

Description

technical field [0001] The invention relates to the technical field of semiconductor device production, in particular to a substrate fixture for vertical double-sided coating. Background technique [0002] Solar energy is an inexhaustible renewable energy for human beings. It is also a clean energy source that does not produce any environmental pollution. Among the effective use of solar energy, solar photovoltaic utilization is the fastest growing and most dynamic research in recent years. field, is one of the most eye-catching projects. For this reason, people have developed and developed solar cells. In recent years, PERC solar cells have entered a bottleneck period of development. As new technologies, heterojunction solar cells and TOPCon solar cells have the potential to improve efficiency. big. [0003] Whether it is a conventional PERC battery, a TOPcon structure, or a HIT structure, a plasma coating process is required to prepare a thin film. At present, the convent...

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Problems solved by technology

[0003] Whether it is a conventional PERC battery, a TOPcon structure, or a HIT structure, a plasma coating process is required to prepare a thin film. At present, the conventional coating equipment is basically a horizontal structure, and the carrier plate is driven by a plate roller. The carrier structure used in this transmission method is often the same as The groove structure corresponding to the size of the silicon wafer, the silicon wafer is limited by the groove due to its own weight, and this coating structure often has shortcomings such as slag dropping and the need to turn over the wafer. Vertical coating equipment has gradually become a design solution for consideration. The carrier board required by the scheme is close to the vertical transmission, and the direct use of the conventional carrier board will have a high probability of falling off the risk of fragments. Based on the above defects and deficiencies, it is necessary to improve the existing technology and design a A substrate fixture for vertical double-sided coating

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