Sampling method of single crystal oxygen sample wafer
A technology of oxygen samples and single crystals, which is applied in the sampling field of single crystal oxygen samples, can solve the problems of affecting the production capacity of silicon wafers and large consumption of silicon rods, etc., and achieve the effects of prolonging the effective service life, increasing production capacity, and improving stability
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Embodiment 1
[0056]In the sampling method of the single crystal oxygen sample of the present embodiment, the sampling tooling adopted comprises:
[0057] base1;
[0058] The deck 2 is composed of a vertical bar 20 and a collar 21, the vertical bar 20 is vertically placed on the top surface of the end of the base 1, and the collar 21 is fixed on the top of the vertical bar 20;
[0059] Slider one 3, its activity is placed on the top surface of base 1;
[0060] Fastener one 5, which cooperates with the slider one 3 to limit the movement of the slider one 3;
[0061] The small-diameter end of the single-crystal head 2000 is clamped in the collar 21 ; the large-diameter end of the single-crystal head 2000 abuts against the slider one 3 .
[0062] The segregation coefficient of oxygen in silicon is greater than one, so in single crystal silicon rods, generally speaking, in the distribution of oxygen content in the axial direction of the single crystal, the oxygen content at the end is the hig...
Embodiment 2
[0075] The sampling method of the single crystal oxygen sample in this embodiment is further improved on the basis of Embodiment 1, and the sampling tool also includes:
[0076] Slider 2 4 is movable on the top surface of base 1, between deck 2 and slider 1 3; the middle of the top of slider 2 4 is sunken downward to form an arc-shaped relief groove 40;
[0077] Fastener 2 6 is connected with slide block 2 4 to limit the movement of slide block 2 4 .
[0078] The cooperation of the slider-3 and the collar 21 can limit and fix the single crystal head 2000 to a certain extent, but there is still no effective support for limiting the force along the width direction of the base 1, so this implementation For example, set slider 2 to 4, such as Figure 4 As shown, the single crystal head 2000 is provided with a limiting force along the width direction of the base 1 .
[0079] The slider two 4 of the present embodiment has the same shape and structure as the slider one 3, except th...
Embodiment 3
[0083] The sampling method of the single crystal oxygen sample of this embodiment is further improved on the basis of Embodiment 2. A fixed rod 30 is formed vertically upward on the top surface of the slider-3, and one side of the fixed rod 30 is close to the slider-3 The faces of seat 2 are coplanar.
[0084] Such as Figure 4 As shown, the fixing rod 30 cooperates with the slider one 3. When abutting and fixing the large-diameter end face of the single crystal head 2000, the contact area with the large-diameter end face can be increased, thereby further improving the stability of the single crystal head. 2000 Fixed stability.
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Abstract
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