A Micro Throttling Refrigerator in Liquid Helium Temperature Zone

A throttling refrigerator and temperature zone technology, applied in refrigerators, refrigeration and liquefaction, modification using liquid cooling, etc., can solve problems such as experimental research on micro throttling refrigerators that have not yet been seen, and reduce processing risks and structure. The effect of compact, simplified processing

Active Publication Date: 2021-08-20
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Micro-throttle refrigerators can be realized through MEMS processing technology, but current research mainly focuses on the temperature range above liquid hydrogen (Cao HS, ter Crake HJM, Progress in and Outlook for Cryogenic Microcooling, Physical Review Applied, 2020, 14, 044044.), there is no experimental research on a micro-throttle refrigerator in the liquid helium temperature zone based on MEMS technology

Method used

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  • A Micro Throttling Refrigerator in Liquid Helium Temperature Zone
  • A Micro Throttling Refrigerator in Liquid Helium Temperature Zone
  • A Micro Throttling Refrigerator in Liquid Helium Temperature Zone

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] see figure 1 , figure 2 , The liquid helium temperature zone micro-throttling refrigerator A of the first embodiment of the present invention is welded into an integral structure by sequentially stacking five layers of substrates 1-5.

[0033] Substrate 1 acts as a cover to seal the rest of the substrates. Substrates 2 and 3 form a first-stage refrigeration circulator and a second-stage refrigeration circulator. Substrates 4 and 5 form a third-stage refrigeration circulator. The first-stage refrigeration cycle The device is located between the substrate 1 and the three-stage refrigeration circulator. in,

[0034] There are six through holes on the top of the substrate 1 as primary working fluid inlet A1, secondary working fluid inlet A3, tertiary working fluid inlet A5, primary working fluid outlet A2, secondary working fluid outlet A4 and tertiary working fluid Quality export A6.

[0035] The top of the substrate 2 is provided with three through holes respectively...

Embodiment 2

[0051] image 3 It is a schematic diagram of the internal structure of the micro throttle refrigerator B in the liquid helium temperature zone of the second embodiment of the present invention. The throttle refrigerator B is welded into an integral structure by successively stacking five layers of substrates 1 to 5. The substrate 2 and the substrate The sheet 3 constitutes a primary refrigeration circulator, and the substrate 4 and substrate 5 constitute a secondary refrigeration circulator and a tertiary refrigeration circulator. in,

[0052] There are six through holes on the top of the substrate 1, respectively serving as the first-level working fluid inlet B1, the second-level working fluid inlet B3, the third-level working fluid inlet B5, the first-level working fluid outlet B2, the second-level working fluid outlet B4 and the third-level working Quality export B6.

[0053] The top of the substrate 2 is provided with five through holes as the first-level working fluid i...

Embodiment 3

[0059] Figure 4 It is a schematic diagram of the internal structure of a micro-throttling refrigerator C in a liquid helium temperature zone according to Embodiment 3 of the present invention. The throttling refrigerator C is welded into an integral structure by sequentially stacking three layers of substrates 1-3.

[0060] Substrate 1 acts as a cover to seal the rest of the substrates, and substrates 2 and 3 constitute a primary refrigeration circulator, a secondary refrigeration circulator and a tertiary refrigeration circulator. in,

[0061] There are six through holes on the top of the substrate 1, which are used as the first-level working fluid inlet C1, the second-level working fluid inlet C3, the third-level working fluid inlet C5, the first-level working fluid outlet C2, the second-level working fluid outlet C4 and the third-level working fluid. Quality export C6.

[0062]The top of the substrate 2 is provided with three through holes as the first-level working flui...

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Abstract

The invention provides a micro-throttle refrigerator in the liquid helium temperature zone, which has three structural forms. The first structure of the micro-throttle refrigerator in the liquid helium temperature zone has five layers of substrates, and the first substrate is used as a cover plate. The second substrate and the third substrate form the first-stage refrigeration circulator and the second-stage refrigeration circulator, and the fourth substrate and the fifth substrate form the third-stage refrigeration circulator; the liquid helium temperature zone of the second structure is micro-throttled The refrigerator has five layers of substrates, the first substrate is used as a cover plate, the second substrate and the third substrate form a first-stage refrigeration circulator, the fourth substrate and the fifth substrate form a second-stage refrigeration circulator and a third-stage refrigeration circulator. Refrigeration circulator; the third structure of the micro throttle refrigerator in the liquid helium temperature zone has three layers of substrates, the first substrate is used as a cover plate, the second substrate and the third substrate constitute a first-stage refrigeration circulator and a second-stage refrigeration circulators and tertiary refrigerated circulators. In the present invention, the channels of multi-stage working fluid are arranged on the same substrate, the structure of the refrigerator is more compact, and the processing cost can be saved.

Description

technical field [0001] The invention belongs to the technical field of micro-throttling refrigerators, in particular to a micro-throttling refrigerator in a liquid helium temperature zone. Background technique [0002] Many electronic devices have higher sensitivity when working in a low temperature environment, such as infrared detection devices used in aerospace, low noise amplifiers in radio telescopes, filters in mobile communication systems, etc. In addition, superconducting electronic devices can only work properly at low temperatures. With the development of micro-electromechanical systems (MEMS), the size of electronic devices is getting smaller and smaller, and the required cooling capacity is also small. However, the existing refrigerators do not match the requirements of electronic devices in terms of size and cooling capacity, and a refrigerator matching it is urgently needed. Miniature throttling refrigerators have the advantages of no moving parts, no vibrati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F25B23/00F25B41/30H05K7/20
CPCF25B23/00H05K7/20309
Inventor 曹海山
Owner TSINGHUA UNIV
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