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Method and device for measuring high reflectivity of laser optical element

A technology of optical components and high reflectivity, which can be used in measuring devices, reflective surface testing, optical instrument testing, etc. It can solve the problem of low measurement accuracy and achieve the effect of high-precision measurement.

Active Publication Date: 2021-03-23
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In order to solve the problem of low measurement accuracy of the traditional measurement method for high reflectivity of laser optical components, the present invention proposes a method and device for measuring high reflectivity of laser optical components

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  • Method and device for measuring high reflectivity of laser optical element
  • Method and device for measuring high reflectivity of laser optical element
  • Method and device for measuring high reflectivity of laser optical element

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with accompanying drawing.

[0041] Such as figure 1 As shown, the laser optical element high reflectivity measurement device provided by the present invention includes a fiber optic point source 1, a collimating mirror 2, a beam splitting prism 3, a reflecting mirror 4, a first self-aligning mirror 5, and a second self-aligning mirror 6. CCD camera 8 and rotating stage 9.

[0042] Optical fiber point source 1, collimating mirror 2, beam splitting prism 3 and reflecting mirror 4 are arranged sequentially along the optical path; the first self-aligning reflecting mirror 5 is arranged on the reflection optical path of reflecting mirror 4; the rotating stage 9 is arranged on the collimating mirror 2 On the reflected light path after the output light beam is reflected by the dichroic prism 3, the second self-aligning mirror 6 is located on the rotating stage 9; the rotating stage 9 is also used to set the...

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Abstract

The invention provides a method and device for measuring high reflectivity of a laser optical element for solving the problem that a traditional method for measuring high reflectivity of a laser optical element is not high in measuring precision. Based on the double-light-path interference principle, the reflectivity of the high-reflectivity element is accurately measured by adopting air measurement and actual measurement, the light splitting ratio of two interference light paths is large, the fringe contrast of air measurement is firstly obtained, then a to-be-measured high-reflectivity mirror is added into the light paths for actual measurement, and the actually measured fringe contrast is obtained; the reflectivity value of the to-be-measured high-reflectivity mirror is calculated through the change of the contrast ratio of the interference fringes, so that the reflectivity of the to-be-measured high-reflectivity mirror can be traced back, and high-precision measurement of high reflectivity is realized.

Description

technical field [0001] The invention belongs to the field of laser measurement technology and equipment, and relates to a method and device for measuring high reflectivity of laser optical elements. Background technique [0002] In the laser system, the mirror is a basic component used in a large number of applications. Its function is to realize the deflection of the optical path, change the layout of the optical path, and make the instrument compact. Among them, the mirror with high reflectivity is widely used in the cavity mirror of the laser system. , Transmission mirrors of ICF laser devices, high-power processing galvanometers, etc., all such mirrors require high reflectivity to improve the output efficiency of the system and reduce light energy loss. At present, the measurement of high reflectivity of laser optical components is a difficult point, especially for the measurement of reflectivity > 99.9%. Due to the noise problem, it is often difficult to achieve hig...

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Application Information

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IPC IPC(8): G01M11/02G01M11/00
CPCG01M11/005G01M11/02G01M11/0207
Inventor 达争尚段亚轩李铭袁索超李红光陈永权董晓娜
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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