A high-order aspheric detection method based on adaptive optics wavefront correction

Abstract

The invention discloses a high-order aspheric surface detection method and system based on adaptive optical wavefront correction, and builds an adaptive optical wavefront correction interferometer to measure high-order aspheric surfaces, and obtains measurement values ​​coupled with various errors; through Combine and adjust the surface of the deformable mirror to form a Zernike free-form surface with different surface shapes, and correct the third-order and above aberrations; use the two-step Zernike mode random parallel gradient descent algorithm to establish a relationship model between the control quantity and the measurement quantity, and optimize the energy gradient of the measurement value G. Save the control parameters of the deformable mirror and fix the corresponding surface shape, perform interference image processing and calculate the measurement results, and use reverse optimization to obtain the deviation between the real and theoretical surface shape of the aspheric surface to be measured; use Zernike polynomials to simulate the measured surface shape Combined, the pose aberration corresponding to the first four terms of the polynomial is subtracted from the measurement result to obtain the final measurement result and complete the aspheric surface detection. The invention improves the dynamic measurement range of the interferometer and simultaneously takes into account the generality of the system and the detection accuracy.

Description

technical field [0001] The invention belongs to the technical field of precision measurement of optical interference instruments, and in particular relates to a high-order aspheric surface detection method and system based on adaptive optical wavefront correction. Background technique [0002] Compared with conventional flat and spherical optical elements, aspherical optical elements have the advantages of correcting aberrations, improving image quality, and simplifying system design. They are widely used in industrial manufacturing, military defense, aerospace, medical diagnosis and other fields. With the innovation of generative processing technology, the manufacture of aspheric surfaces tends to have large diameters, high precision and complex surface shapes. In order to ensure the surface processing quality of optical components, the inspection process is very important. The surface shape detection methods of optical components can be divided into contact and non-contac...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a high-order aspheric surface detection method and system based on adaptive optical wavefront correction to make up for the small dynamic range of traditional interferometer measurement and the accumulation of sub-aperture splicing. The error is large, and the universality of the zero-position interferometry is poor, and the universality and detection accuracy are taken into account at the same time

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