Washing method for preventing residues on surface of plate component

Abstract

The invention discloses a washing method for preventing residues on the surface of a plate component. The washing method comprises the following step 10 of high-pressure water and sand blasting washing; the step 20 of primary ultrasonic washing; the step 30 of checking and correcting; the step 40 of secondary ultrasonic washing; and the step 50 of drying. According to the method, high-pressure water washing and sand blasting operation are combined, and the washing effect on the plate component can be ensured.

Description

technical field [0001] The invention belongs to the field of surface cleaning of anti-slip parts, and in particular relates to a method for cleaning residues on the surface of anti-slab parts. Background technique [0002] There are a large number of anti-plate parts in the coating chamber of the integrated circuit manufacturing industry. The main function of this part is to protect the chamber from pollution and to attach excess materials during the coating process. The cleaning method of anti-slip parts is mainly chemical liquid washing + sandblasting. Chemical liquid washing is used to remove the surface film of the part, and sandblasting is used to ensure that the surface roughness of the part can meet the coating requirements. The chemical liquid washing and sandblasting operations of the traditional process will introduce the problem of chemical residue and part deformation. These two types of problems will greatly affect the service life of the anti-seizing board. At ...

AI Technical Summary

Problems solved by technology

The chemical liquid washing and sandblasting operations of the traditional process will introduce the problem of chemical residue and part deformation. These two types of problems will greatly affect the service life of the anti-seizing board. At the same time, the chemical residue may cause chemical pollution of the vacuum coating chamber.

[0003] Among them, the problem of chemical potion residue is mainly that anti-staining board parts must be removed by chemical potion in the traditional cleaning process. Due to the large roughness of the surface of this type of part, chemical potion is easy to remain on the rough surface and cannot be completely removed.

The deformation of the surface of the part is mainly due to the high-speed impact of the sand material on the surface of the protective plate during the sandblasting operation to generate a large amount of heat, and because the sandblasting is a local operation, the temperature in the local area of ​​the part will be too high, and the high temperature will cause elastic deformation of the thin plate of the part, which cannot Correction