Ultrafast laser multi-focus large-spacing parallel processing device and method

Abstract

The invention discloses an ultrafast laser multi-focus large-spacing parallel processing device and method. The device comprises an ultrafast laser generator, a beam expander, a beam splitter prism, a spatial light modulator, a reflector, a long-distance beam splitting transmission array group, a focusing galvanometer group and workpieces. The ultrafast laser generator generates ultrashort pulse laser beams, the ultrashort pulse laser beams are modulated by the spatial light modulator and an optical device, the laser beams are subjected to light splitting transmission by the long-distance light splitting transmission array group and are incident to the focusing galvanometer group to be focused, and multi-focus parallel machining is performed on a plurality of areas on a large-format workpiece and the multiple workpieces. According to the ultrafast laser multi-focus large-spacing parallel processing device and method, the micron-scale light beam spacing limitation modulated by the spatial light modulator and the optical device is broken through, the beam splitting distance is increased from the micron scale to the meter scale or above, the problem that a plurality of areas on a large-format workpiece or a plurality of workpieces are difficult to process is solved, and compared with the micro-spacing light beam array processing modulated by the spatial light modulator and the optical device, the method is larger in processing breadth and higher in processing efficiency.

Description

technical field [0001] The invention relates to the technical field of special processing, in particular to an ultrafast laser multi-focus large-pitch parallel processing device and method. Background technique [0002] With the continuous development of short-pulse and ultra-short-pulse lasers, the continuous upgrading of large-format laser processing technology and the transformation of market demand, in order to obtain higher processing efficiency, more and more applications have been made in the fields of consumer electronics, new displays, and biomedicine. The more applications, these new requirements become more stringent for laser processing fineness and high efficiency. Stimulated by strong market demand, ultrafast laser technology has continuously made new breakthroughs, and has quickly become the development direction that the industry focuses on. [0003] Ultrafast lasers have ultra-short pulses and ultra-intense characteristics, and can obtain extremely high pea...

AI Technical Summary

Problems solved by technology

However, the distance between the beams of the prior art is on the order of microns, which limits the width of laser processing, and the processing efficiency is still low

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