Gas inlet system of coating device

A technology of a coating device and an air intake system, which is applied in the field of air intake system, can solve the problems of reducing diamond-like carbon production efficiency, increasing the cost of diamond-like carbon film, and occupying the capacity of a vacuum chamber.

Active Publication Date: 2021-06-04
JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The gas homogenizer is installed on the side of the upper electrode and the lower electrode and does not surround the substrate, so the gas supplied to the vacuum chamber through the gas homogenizer will inevitably affect the uniformity of the gas due to its installation position
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  • Gas inlet system of coating device
  • Gas inlet system of coating device
  • Gas inlet system of coating device

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Embodiment Construction

[0044] The following description serves to disclose the present invention to enable those skilled in the art to carry out the present invention. The preferred embodiments described below are only examples, and those skilled in the art can devise other obvious variations. The basic principles of the present invention defined in the following description can be applied to other embodiments, variations, improvements, equivalents and other technical solutions without departing from the spirit and scope of the present invention.

[0045] Those skilled in the art should understand that in the disclosure of the present invention, the terms "vertical", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention...

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Abstract

The invention mainly provides a gas inlet system of a coating device. The gas inlet system is used for the coating device to provide coating gas for at least one product to be coated, the coating device is used for carrying out diamond-like coating on the product to be coated, and the gas inlet system of the coating device comprises at least one stand column, and the coating device provides coating gas for the surface of the product to be coated through the stand column.

Description

technical field [0001] The invention relates to an air intake system and an air intake method of a coating device, in particular, the invention relates to an air intake system capable of improving coating uniformity. Background technique [0002] Diamond-like carbon film has high hardness, low friction coefficient, high wear resistance and good chemical stability, thermal conductivity, electrical insulation, light transmission and biocompatibility, as a new functional film material in mechanical wear-resistant coating , optical windows, microelectromechanical systems (MEMS) and semiconductor materials have broad application prospects. [0003] The diamond-like material is an amorphous structure of carbon, and the preparation of the diamond-like film needs to obtain the metastable sp in the non-equilibrium process 3 and sp 2 bonded carbon. The main methods include physical vapor deposition, chemical vapor deposition and liquid phase preparation techniques. [0004] Among ...

Claims

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Application Information

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IPC IPC(8): C23C16/455C23C16/458C23C16/26C23C16/517
CPCC23C16/45578C23C16/4585C23C16/26C23C16/517
Inventor 宗坚
Owner JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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