Rectification device for electronic-grade sulfur hexafluoride and control method thereof

A technology of sulfur hexafluoride and control methods, applied in chemical instruments and methods, distillation adjustment/control, separation methods, etc., can solve the problems of less or more impurities, affecting production, reducing economic benefits, etc., and achieve steam output The effect of volume increase

Active Publication Date: 2021-06-11
FUJIAN DEER TECH CORP
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] In order to make up for the deficiencies of the existing technology and solve the problem that there is no recovery and treatment device for the first-stage distillation column material in the prior art, the heavy component impurities such as octafluoropropane and low-sulfur fluoride in the column can only be manually discharged from the column. In addition, another treatment is arranged. If the sewage is not discharged in time, too much heavy component impurities will be enriched in the t

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  • Rectification device for electronic-grade sulfur hexafluoride and control method thereof
  • Rectification device for electronic-grade sulfur hexafluoride and control method thereof
  • Rectification device for electronic-grade sulfur hexafluoride and control method thereof

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Embodiment approach

[0040] As an embodiment of the present invention, the reflux pipe 23 is located inside the primary rectification tower 1 and the secondary rectification tower 11 and is in a spiral shape, and the reflux liquid in the reflux pipe 23 promotes the rotation of the separation wheel 4 ;

[0041] During work, the liquid condensed in the first condenser 2 and the second condenser 21 is refluxed in the primary rectification column 1 and the secondary rectification column 11 along the reflux pipe 23, and there is a gap between the refluxed liquid and the rising gas. Heat exchange, and then condense the substance with higher boiling point, and then effectively purify the output steam. The design of the spiral return pipe 23 effectively expands the contact range between the returning liquid and the steam flow, and makes the condensation effect more effective. Well, at the same time, the liquid condensed on the outer wall of the return pipe 23 and the liquid in the return pipe 23 are guide...

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Abstract

The invention belongs to the technical field of sulfur hexafluoride production, and particularly relates to a rectification device for electronic-grade sulfur hexafluoride and a control method thereof. The rectification device comprises a rectification mechanism and a separation mechanism, wherein the rectification mechanism comprises a first-stage rectification tower, a second-stage rectification tower and a third-stage rectification tower; the first-stage rectification tower, the second-stage rectification tower and the third-stage rectification tower are cylindrical cavity type rectification towers; the middle part of the first-stage rectification tower is fixedly connected with a feeding pipe; and the feeding pipe is externally connected with a molding press and a precooler. According to the device, a separation wheel and an evaporation cavity are arranged, the separation wheel is driven to rotate through impact of fed materials, then a fluid is divided by an evaporation cavity, a small part of liquid integrally separated from sulfur hexafluoride liquid is rapidly evaporated under continuous heat conduction effect, and due to the fact that the content of the liquid in the evaporation cavity is small, temperature change is obvious, and pure sulfur hexafluoride liquid is effectively separated by utilizing different boiling points of the liquid.

Description

technical field [0001] The invention belongs to the technical field of sulfur hexafluoride production, in particular to a rectification device for electronic-grade sulfur hexafluoride and a control method thereof. Background technique [0002] In the prior art, there is no recovery and treatment device for the first-stage rectification tower still material, and the heavy component impurities such as octafluoropropane and low-sulfur fluoride in the tower can only be manually discharged out of the tower, and other arrangements are made for treatment. In time, if too much heavy component impurities are enriched in the tower kettle, it will not be able to provide qualified materials for the secondary rectification tower, which will affect the production and product quality, and manually arrange heavy components, which will easily cause less or more impurities to be discharged. Less rowing may still affect product quality, and more rowing will cause product loss and reduce econom...

Claims

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Application Information

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IPC IPC(8): B01D3/14B01D3/42C01B17/45
CPCB01D3/143B01D3/148B01D3/42C01B17/453
Inventor 李纪明罗浩赖甜华邱玲赖金香张国聪
Owner FUJIAN DEER TECH CORP
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