Rectification device for electronic-grade sulfur hexafluoride and control method thereof

Abstract

The invention belongs to the technical field of sulfur hexafluoride production, and particularly relates to a rectification device for electronic-grade sulfur hexafluoride and a control method thereof. The rectification device comprises a rectification mechanism and a separation mechanism, wherein the rectification mechanism comprises a first-stage rectification tower, a second-stage rectification tower and a third-stage rectification tower; the first-stage rectification tower, the second-stage rectification tower and the third-stage rectification tower are cylindrical cavity type rectification towers; the middle part of the first-stage rectification tower is fixedly connected with a feeding pipe; and the feeding pipe is externally connected with a molding press and a precooler. According to the device, a separation wheel and an evaporation cavity are arranged, the separation wheel is driven to rotate through impact of fed materials, then a fluid is divided by an evaporation cavity, a small part of liquid integrally separated from sulfur hexafluoride liquid is rapidly evaporated under continuous heat conduction effect, and due to the fact that the content of the liquid in the evaporation cavity is small, temperature change is obvious, and pure sulfur hexafluoride liquid is effectively separated by utilizing different boiling points of the liquid.

Description

technical field [0001] The invention belongs to the technical field of sulfur hexafluoride production, in particular to a rectification device for electronic-grade sulfur hexafluoride and a control method thereof. Background technique [0002] In the prior art, there is no recovery and treatment device for the first-stage rectification tower still material, and the heavy component impurities such as octafluoropropane and low-sulfur fluoride in the tower can only be manually discharged out of the tower, and other arrangements are made for treatment. In time, if too much heavy component impurities are enriched in the tower kettle, it will not be able to provide qualified materials for the secondary rectification tower, which will affect the production and product quality, and manually arrange heavy components, which will easily cause less or more impurities to be discharged. Less rowing may still affect product quality, and more rowing will cause product loss and reduce econom...

AI Technical Summary

Problems solved by technology

[0005] In order to make up for the deficiencies of the existing technology and solve the problem that there is no recovery and treatment device for the first-stage distillation column material in the prior art, the heavy component impurities such as octafluoropropane and low-sulfur fluoride in the column can only be manually discharged from the column. In addition, another treatment is arranged. If the sewage is not discharged in time, too much heavy component impurities will be enriched in the tower kettle, and it will not be able to provide qualified materials for the secondary distillation tower, which will affect production and product quality. And manual rearrangement of components is easy. The phenomenon of fewer or more rows of impurities is caused. Less rows may still affect product quality, and more rows will cause product losses and reduce economic benefits. A rectification device for electronic grade sulfur hexafluoride proposed by the present invention and its control method

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