Shape and position error interference measurement device and method for transparent hemispherical shell part

Abstract

The invention discloses a shape and position error interference measurement device and method for a transparent hemispherical shell part. The device comprises a vibration isolation platform provided with a laser wave surface interferometer and an interferometer optical axis direction translation platform, wherein the light outlet of the laser wave surface interferometer is provided with a spherical lens, a shell deflection rotary table is installed on the interferometer optical axis direction translation platform, a shell rotation rotary table is installed on the shell deflection rotary table, a shell centering platform is installed on the shell rotation rotary table, an installation position used for installing a measured hemispherical shell is arranged on the shell centering platform, the axis of the shell deflection rotary table and the axis of the shell rotation rotary table intersect at the sphere center of the measured hemispherical shell. According to the invention, the device can be used for the interference measurement of the surface shape error and thickness difference of the inner and outer spherical surfaces of the transparent hemispherical shell, and has the advantages of simple structure and high precision; and the method is based on the phase shift interference sub-aperture scanning splicing principle, the measurement range is large, and the resolution ratio is high.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a shape and position error interferometric measurement device and method of a transparent hemispherical shell part. Background technique [0002] Transparent hemispherical shell parts such as high-quality fused silica hemispherical resonator is a key part in the hemispherical resonator gyroscope. Its shape is a hemispherical thin-walled shell with a central anchor column, and its diameter is generally Wall thickness is generally 0.3 ~ 1.1mm. An ideal harmonic oscillator should have a high quality factor, elastic material and isotropy of energy dissipation, but the actual processing technology is limited by the precision of the machine tool, resulting in uneven shape and thickness difference between the inner and outer spherical surfaces of the hemispherical shell, correspondingly The uneven mass distribution of the harmonic oscillator, especially the exist...

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Problems solved by technology

However, the above methods can only detect the surface error of the sphere or spherical shell parts, but cannot detect the thickness error of the shell

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