Wafer bar end cutting device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 四川上特科技有限公司
- Publication Date
- 2021-08-20
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Abstract
Description
technical field
[0001] The invention relates to the related technical field of wafer processing equipment, in particular to a wafer bar end cutting device. Background technique
[0002] A chip is a general term for semiconductor component products. In electronics, it is a way to miniaturize circuits and is often manufactured on the surface of a semiconductor wafer.
[0003] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its raw material is silicon. High-purity polycrystalline silicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After the silicon ingot is ground, polished, and sliced, it forms a silicon wafer, that is, a wafer.
[0004] The main processing methods of wafers are sheet processing and batch processing, that is, one or more wafers are processed at the same time. As semiconductor feature sizes become smaller and processing and measurement equipment b...