High-response high-thermal-stability stannic oxide sensor and preparation method thereof
A high thermal stability, tin dioxide technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of sensitivity, low powder stability, mutation, etc.
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Embodiment 1
[0031] A high-response and high-thermal-stability tin dioxide sensor of the present invention comprises: a substrate, an interdigitated metal electrode layer, and a sensing conductor, the interdigitated metal electrode layer is located on the upper surface of the substrate, and the sensing conductor is located on the interdigitated The upper surface of the metal electrode layer, the sensing conductor is SnO 2 Thin film material, sensing conductor used to detect gas content in high temperature environment.
[0032] In this example, the preparation of SnO 2 The steps for thin film materials are as follows:
[0033] S1. Weigh 0.35g SnCl 4 ·5H 2 O dissolve it in solution A, solution A is prepared by 10ml deionized water and 10ml ethanol;
[0034] S2. Adjust the pH value of solution A by using NaOH solution with pH=13 until the pH of solution A=4 to obtain solution B;
[0035] S3. Pour the solution B into the reactor to carry out the hydrothermal reaction. The temperature of t...
Embodiment 2
[0043] The only difference from Example 1 is that the substrate is made of insulating material, and the interdigitated metal electrode layer is a platinum electrode made by microelectronics technology on the substrate, and the platinum electrode is interdigitated, which can improve the reliability of the production process. High repeatability, conducive to mass production. SnO 2 The thin film material consists of nanorods, SnO 2 Film surface with nodules, SnO 2 The thin film material is evenly located on the upper surface of the interdigitated metal electrode layer, which can improve the SnO 2 The surface ratio of the thin film material is beneficial to improve the sensitivity. In addition, it also includes a protective shell, which is provided with several holes for ventilation, and the base, the interdigitated metal electrode layer and the sensing conductor are all packaged inside the protective shell.
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