Silicon-based OLED (Organic Light Emitting Diode) micro display and manufacturing method thereof
A technology of micro-display and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, instruments, semiconductor devices, etc., can solve the problems of insufficient viewing presence and poor visual experience, and achieve optimized viewing experience, realistic sense of presence, and comfortable visual experience Effect
Pending Publication Date: 2021-07-30
深圳市芯视佳半导体科技有限公司
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Problems solved by technology
[0003] However, the current silicon-based OLED microdisplay is a flat display, which lacks the sense of presence and poor visual experience.
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[0033] Embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although embodiments of the present application are shown in the drawings, it should be understood that the present application may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the scope of this application to those skilled in the art.
[0034] The terminology used in this application is for the purpose of describing particular embodiments only, and is not intended to limit the application. As used in this application and the appended claims, the singular forms "a", "the", and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It should also be understood that the term "and / or" as used herein refers to and includes any and all possible ...
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The invention relates to a silicon-based OLED micro display and a manufacturing method thereof. The method comprises the following steps: manufacturing a curved-surface silicon-based integrated circuit back plate, namely determining a thickness requirement corresponding to the curved-surface silicon-based integrated circuit back plate according to a preset curved-surface curvature radius requirement, and reducing the thickness of the curved-surface silicon-based integrated circuit back plate to a set range through a set process according to the determined thickness requirement; forming an anode layer on the curved-surface silicon-based integrated circuit backboard, and evaporating an OLED display device on the anode layer to form an OLED light-emitting layer; performing thin film packaging on the OLED display device to form a thin film packaging layer; manufacturing a color filter on the thin film packaging layer to form a color filter layer; attaching a cover plate to the color filter layer to form a cover plate packaging layer, and obtaining the silicon-based OLED micro display. According to the scheme provided by the invention, the curved-surface silicon-based OLED micro-display can be manufactured, so that the sense of immediacy of pictures during watching is improved, and the visual experience is improved.
Description
technical field [0001] The present application relates to the technical field of silicon-based OLED display applications, in particular to a silicon-based OLED microdisplay and a manufacturing method thereof. Background technique [0002] Silicon-based OLED (Organic Light Emitting Display, organic light-emitting diode display) is called the dark horse of next-generation display technology, which is different from conventional AMOLED (Active- Matrix organic light-emitting diode, active matrix organic light-emitting diode) device, which is an active organic light-emitting diode display device made of single crystal silicon as the active driving backplane, and the pixel size is 1 / 10 of the traditional display device , the fineness is much higher than that of traditional devices, and it has many advantages such as high resolution, high integration, low power consumption, small size, and light weight. At present, silicon-based OLED microdisplays are mainly used in the field of n...
Claims
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IPC IPC(8): H01L21/306H01L51/56H01L27/32H01L51/52G09F9/30G09F9/33
CPCH01L21/30625G09F9/301G09F9/33H10K59/121H10K50/84H10K59/1201H10K71/00
Inventor 不公告发明人
Owner 深圳市芯视佳半导体科技有限公司