Bidirectional power device and manufacturing method thereof

Abstract

The invention discloses a bidirectional power device and a manufacturing method thereof. The bidirectional power device comprises the following components of: a semiconductor layer; a first doped region in the semiconductor layer; a plurality of trenches of a first trench region; a gate dielectric layer; a control gate; a first shielding dielectric layer; a first shielding gate; a second shielding dielectric layer; and a second shielding gate. The plurality of trenches of the first trench region are located in the first doped region and divide the first doped region into first type sub-doped regions and second type sub-doped regions which are distributed alternately; the gate dielectric layer, the control gate, the first shielding dielectric layer, the first shielding gate, the second shielding dielectric layer and the second shielding gate are located in the multiple trenches; the control gate and the first shielding gate are separated by the first shielding dielectric layer; the second shielding gate and the first shielding gate are separated by the second shielding dielectric layer; and the thickness of the second shielding dielectric layer and the thickness of the gate dielectric layer are both smaller than the thickness of the first shielding dielectric layer. According to the bidirectional power device, the thickness of the second shielding dielectric layer and the thickness of the gate dielectric layer are both smaller than the thickness of the first shielding dielectric layer, so that the effect of forming different electric fields can be achieved by applying different voltages through a gate electrode.

Description

technical field [0001] The present application relates to the technical field of semiconductor manufacturing, and more specifically, to a bidirectional power device and a manufacturing method thereof. Background technique [0002] Bidirectional power devices are widely used in charging devices with a secondary charging function. Taking the lithium battery charging and discharging device as an example, when the lithium battery charging and discharging device continues to supply power to the terminal equipment to a certain extent, it is necessary to prevent the lithium battery from over-discharging to prevent the terminal equipment from stopping, and to charge the lithium battery in time. In the process of charging the lithium battery, the lithium battery also needs to supply power to the terminal equipment, and at the same time prevent the lithium battery from being overcharged. Therefore, in order to manage and control the charge and discharge state of the lithium battery, ...

AI Technical Summary

Problems solved by technology

However, the MOS process using a planar gate structure requires sufficient area to meet higher withstand voltage requirements, and at the same time, the conduction efficiency of the device is very low and the power consumption is large

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