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Bidirectional power device and method of making the same

A technology of bidirectional power device and manufacturing method, applied in semiconductor/solid-state device manufacturing, semiconductor device, electric solid-state device and other directions, can solve the problems of high power consumption and low device conduction efficiency, and achieve the effect of improving withstand voltage characteristics

Active Publication Date: 2022-08-02
HANGZHOU SILAN MICROELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the MOS process using a planar gate structure requires sufficient area to meet higher withstand voltage requirements, and at the same time, the conduction efficiency of the device is very low and the power consumption is large

Method used

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  • Bidirectional power device and method of making the same
  • Bidirectional power device and method of making the same
  • Bidirectional power device and method of making the same

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Embodiment Construction

[0056] The present invention will be described in more detail below with reference to the accompanying drawings. In the various figures, like elements are designated by like reference numerals. For the sake of clarity, various parts in the figures have not been drawn to scale. Additionally, some well-known parts may not be shown. For the sake of simplicity, the semiconductor structure obtained after several steps can be depicted in one figure.

[0057] It will be understood that, in describing the structure of a device, when a layer or region is referred to as being "on" or "over" another layer or region, it can be directly on the other layer or region, or Other layers or regions are also included between it and another layer, another region. And, if the device is turned over, the layer, one region, will be "under" or "under" another layer, another region.

[0058] In order to describe the situation directly above another layer or another area, expressions such as "directl...

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Abstract

The present application discloses a bidirectional power device and a manufacturing method thereof. The bidirectional power device comprises: a semiconductor layer; a first doped region located in the semiconductor layer; a plurality of trenches in the first trench region located in the first doped region In the region, the first doping region is divided into alternating first type sub-doping regions and second sub-doping regions; the gate dielectric layer, the control gate, the first shielding dielectric layer, the a shielding grid, a second shielding dielectric layer, and a second shielding grid, wherein the first shielding dielectric layer separates the control grid from the first shielding grid, the second shielding dielectric layer separates the second shielding grid and the first shielding grid, and the first shielding dielectric layer separates the control grid from the first shielding grid. The thicknesses of the second shielding dielectric layer and the gate dielectric layer are both smaller than the thickness of the first shielding dielectric layer. In the bidirectional power device, the thicknesses of the second shielding dielectric layer and the gate dielectric layer are both smaller than the thickness of the first shielding dielectric layer, so that different voltages can be applied through the gate electrode to achieve the effect of forming different electric fields.

Description

technical field [0001] The present application relates to the technical field of semiconductor manufacturing, and more particularly, to a bidirectional power device and a manufacturing method thereof. Background technique [0002] Bidirectional power devices are widely used in charging devices with a secondary charging function. Taking the lithium battery charging and discharging device as an example, when the lithium battery charging and discharging device continues to supply power to the terminal equipment to a certain extent, it is necessary to prevent the lithium battery from being overdischarged to prevent the terminal equipment from stopping, and the lithium battery needs to be charged in time. In the process of charging the lithium battery, the lithium battery also needs to supply power to the terminal equipment, and at the same time, it is necessary to prevent the lithium battery from being overcharged. Therefore, in order to manage and control the charge-discharge ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/8232H01L29/06H01L27/02
CPCH01L29/0615H01L27/092H01L29/0847H01L29/4236H01L29/42368H01L29/42376H01L29/7834H01L29/66621H01L29/1041H01L29/407H01L29/404H01L29/1087
Inventor 杨彦涛张邵华
Owner HANGZHOU SILAN MICROELECTRONICS
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