Perpendicular magnetic recording medium
A technology of perpendicular magnetic recording and medium, applied in magnetic recording, data recording, recording information storage, etc.
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Embodiment 1～142
[0085] (Examples 1-142, Comparative Examples 1-20)
[0086] with figure 1 The same layer composition (on the substrate 12, an adhesion layer 14, a seed layer 16, a first Ru base layer 18, a second Ru base layer 20, a buffer layer 22, a perpendicular magnetic recording layer 24, a cap layer 26 and a surface protection layer are sequentially formed. Layer configuration of layer 28), perpendicular magnetic recording media of Examples 1 to 142 and Comparative Examples 2 to 20 were produced. Specifically, as follows.
[0087] As the substrate 12, a glass substrate is used.
[0088] As the adhesion layer 14 , a 5 nm Ta layer was formed under the conditions of an argon gas pressure of 0.6 Pa and an input power of 500 W.
[0089] As the seed layer 16, a 6nm Ni 90 W 10 Floor.
[0090] As the first Ru base layer 18 , a 10 nm Ru layer was formed under the conditions of an argon gas pressure of 0.6 Pa and an input power of 500 W.
[0091] As the second Ru base layer 20 , a 10 nm Ru...
Embodiment 143～159、 comparative example 21
[0112] In Examples 143 to 159 and Comparative Example 21, the composition of the cap layer was changed, samples were prepared, and the activated particle diameter GD of the cap layer was measured. act , to evaluate the thermal stability of the cap layer. In the samples of Examples 143 to 159 and Comparative Example 21, the perpendicular magnetic recording layer 24 was not provided, and the cap layer 26 with a thickness of 16 nm was provided on the buffer layer 22 . The other points were prepared in the same manner as in Examples 1 to 142. It should be noted that the film formation conditions when the cap layer 26 with a thickness of 16 nm is provided on the buffer layer 22 are set at an argon gas pressure of 4.0 Pa and an input power of 500 W.
[0113] For each sample of Examples 143 to 159 and Comparative Example 21, the activated particle diameter GD was measured using a magneto-optical Kerr effect measuring device (MagnetoOptical Kerr Effect (MOKE)). act .
[0114] The m...
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