Method for preparing coating powder by adopting plasma vapor deposition process

A plasma vapor and vapor phase deposition technology, which is applied in the direction of coating, ion implantation plating, metal material coating process, etc., to achieve good dispersion effect

Active Publication Date: 2021-08-06
株洲弗拉德科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Traditional plasma chemical vapor deposition coating composite materials (PVD coating composite materials) are generally larger products, such as coated blades, coated films, etc.; for coating coating on the surface of micron-sized powder materials, The traditional process generally adopts CVD process, but PVD process is used to prepare coating powder materials, and there are few reports

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  • Method for preparing coating powder by adopting plasma vapor deposition process
  • Method for preparing coating powder by adopting plasma vapor deposition process

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Effect test

Embodiment 1

[0033] Such as figure 1 with 2 As shown, the present embodiment provides a fluidized plasma vapor deposition furnace. The furnace body 4 is provided with a feed port 4001 and a discharge port 4002. The electric heating element 5 is arranged outside the furnace body 4. Inside the furnace body 4 is provided The positive plate 3 and the negative plate 1, the positive plate 3 is arranged above the negative plate 1, a certain working distance is kept between the positive plate 3 and the negative plate 1, the deposition area is between the positive plate 3 and the negative plate 1, the positive plate 3 and the There is a parallel space or approximately parallel space between the negative plates 1, and the negative plate 1 is connected with a vibrating device, which has the function of vibrating material delivery. A stirring and feeding mechanism 5 is provided below the negative plate 1, wherein the stirring and feeding mechanism can be a vertical stirring and feeding mechanism or a...

Embodiment 2

[0038] This embodiment provides a method for preparing coating powder by plasma vapor deposition process, which is completed based on the fluidized plasma vapor deposition furnace in Example 1. The powder is artificial graphite particles, D50=15 μm, and the coating material is nanometer Silicon, source gas is SiH 4 , the specific deposition process includes the following steps:

[0039] S1. Put 93kg of artificial graphite particles into the hopper at the upper end of the feed port 4001 of the fluidized plasma vapor deposition furnace, wait for the feed, and vacuumize the deposition furnace until the pressure in the furnace is 0.01 to 2 Torr;

[0040]S2. The electric heating element is energized, and the temperature of the deposition furnace is raised to 500°C, so that the negative plate 1 is in a vibrating working state, and the speed of the feeding and stirring mechanism 5 is adjusted to the speed required by the process, and the stirring and feeding mechanism 5 is used to tr...

Embodiment 3

[0045] This embodiment provides a method for preparing coating powder by plasma vapor deposition process, which is completed based on the fluidized plasma vapor deposition furnace in Example 1. The powder is artificial graphite particles, D50=15 μm, and the coating material is nanometer Silicon and nano carbon, the source gas is SiH 4 and propylene, the specific deposition coating process includes the following steps:

[0046] S1. Put 85kg of artificial graphite particles into a fluidized plasma vapor deposition furnace, and vacuumize the deposition furnace until the pressure in the furnace is 0.01 to 2 Torr;

[0047] S2. Power on the electric heating element, raise the temperature of the deposition furnace to 500°C, put the negative plate 1 in a vibrating working state, adjust the speed of the feeding and stirring mechanism 5 to the speed required by the process, and stir and feed the powder under the negative plate 1 Transported to the negative plate 1, the negative plate 1...

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Abstract

The invention discloses a method for preparing coating powder by adopting a plasma vapor deposition process. The coating powder comprises a base material and one or more coating materials deposited on the surface of the base material. The preparation method of the coating powder comprises the following steps of: depositing one or more coating materials on the surfaces of base material particles by adopting a plasma enhanced chemical vapor deposition process, wherein the plasma enhanced chemical vapor deposition process is carried out in a fluidized plasma vapor deposition furnace. The base material powder in the invention is in fluidized cyclic motion in the vapor deposition process, the coating materials are relatively uniformly distributed in the deposited composite powder in a nano particle form, and the coating materials rapidly generate a compact accumulation layer on the surfaces of the base material particles, so that the base material and the coating are firmly combined together, no mutual bonding phenomenon exists among the composite powder particles, and good dispersity is achieved.

Description

technical field [0001] The invention relates to the technical field of vapor deposition and the technical field of coating powder, and more particularly, relates to a method for preparing coating powder by using a plasma vapor deposition process. Background technique [0002] Vapor deposition method is one of the main methods for preparing coated composite materials. It passes the source gas into the deposition furnace, and the source gas undergoes thermal decomposition under the action of high temperature, electric field, plasma field, etc., so that the active components are deposited on the substrate. The surface of the material forms a coating composite material, which has the characteristics of simple process and suitable for large-scale production. [0003] Traditional plasma chemical vapor deposition coating composite materials (PVD coating composite materials) are generally larger products, such as coated blades, coated films, etc.; for coating coating on the surface ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44C23C16/50C23C14/22
CPCC23C16/4417C23C16/50C23C14/223
Inventor 言伟雄袁建陵
Owner 株洲弗拉德科技有限公司
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