Silver ion sensor based on titanium carbide MXene field effect transistor and application thereof
A field-effect transistor and titanium carbide technology, which is applied in the field of chemical sensors, can solve the problems of restricting the detection performance of FET sensors and limiting the portability of sensors, and achieve the effects of low preparation and operation costs, high ease of operation, and fast response speed
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[0041] refer to figure 1 , a silver ion sensor based on a titanium carbide MXene field effect transistor, including a silicon gate 1 of the transistor and a photolithographic substrate of a silicon dioxide layer 2 on its surface, and forming a layer containing interdigitated fingers on the surface of the silicon dioxide layer 2 by laser lithography technology The source 3 and drain 4 electrode pairs in the area, the interdigital electrode width l is 2 μm, the distance d between adjacent interdigital electrodes is 1.5 μm, and the interdigital electrode area is deposited with Ti 3 C 2 T x The MXene layer 5 is used as the semiconductor conducting channel material of field effect transistors to construct Ti without any probe modification 3 C 2 T x MXene field effect transistor sensor, the device is applied to the sensing and detection of silver ions in water.
[0042] The specific fabrication process of the silver ion sensor based on the titanium carbide MXene field effect ...
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