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Cooling disc body with internal annular channel and preparation method of cooling disc body

A technology of annular channel and cooling plate, which is applied in the direction of manufacturing tools, heat exchange equipment, heat treatment equipment, etc., can solve the problems of complex water channel structure and easy mutual influence of branch liquid flow, so as to reduce production cost, good sealing performance, and high-quality products The effect of high pass rate

Pending Publication Date: 2021-08-27
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The structure of the water channel in the cooling plate is complicated, and the flow of the branch liquids is easily affected by each other, and the preparation steps of the cooling plate in this method are relatively simple, and no operations such as heat treatment are involved.

Method used

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  • Cooling disc body with internal annular channel and preparation method of cooling disc body
  • Cooling disc body with internal annular channel and preparation method of cooling disc body

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0079] The preparation method comprises the following steps:

[0080] (1) Machining the main board 1 and the cover plate 3, forming an annular groove 2 on the main board 1, assembling it with the cover plate 3, and then performing friction stir welding to obtain the combined disc body;

[0081] (2) Carrying out heat treatment and solid solution aging treatment successively to the combined disc body obtained in step (1), cleaning and drying successively after cooling;

[0082] (3) Perform anodic oxidation on the combined disc body treated in step (2) to obtain the cooling disc body.

Embodiment 1

[0085] This embodiment provides a cooling plate body with an internal annular channel, the cooling plate body includes a main board 1 and a cover plate 3, wherein the schematic cross-sectional structure of the main board 1 is shown in figure 1 As shown, the schematic diagram of the top view structure of the cooling plate is as follows figure 2 As shown, the main board 1 is evenly provided with an annular groove 2, and the cover plate 3 is used together with the main board 1 to cover one side of the annular groove 2 on the main board 1, and the annular groove 2 constitutes a cooling plate body the internal annular channel;

[0086] The cooling plate is in the shape of a volute as a whole, including a volute main body 4 and a volute inlet 5, and the inlet and outlet of the annular channel are both arranged at the volute inlet 5 to communicate with the outside world.

[0087] The annular grooves 2 on the main board 1 are coiled at intervals, and there are 6 rings of annular gro...

Embodiment 2

[0095]This embodiment provides a cooling plate body with an internal annular channel, the cooling plate body includes a main board 1 and a cover plate 3, the main board 1 is uniformly provided with an annular groove 2, the cover plate 3 and the main board 1 Matching use, covering the side of the annular groove 2 on the main board 1, the annular groove 2 forms the inner annular channel of the cooling plate;

[0096] The cooling plate is in the shape of a volute as a whole, including a volute main body 4 and a volute inlet 5, and the inlet and outlet of the annular channel are both arranged at the volute inlet 5 to communicate with the outside world.

[0097] The annular grooves 2 on the main board 1 are coiled at intervals, and four rings of the annular grooves 2 are provided.

[0098] The depth of the annular groove 2 is 40% of the thickness of the main board 1 .

[0099] The cross-sectional shape of the annular groove 2 is rectangular.

[0100] The thickness of the main boa...

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Abstract

The invention provides a cooling disc body with an internal annular channel and a preparation method of the cooling disc body. The cooling disc body comprises a main plate and a cover plate, annular grooves are evenly formed in the main plate, the cover plate is used in cooperation with the main plate and covers one side of the annular grooves in the main plate, and the annular grooves form the internal annular channel of the cooling disc body; and the whole cooling disc body is in a volute shape and comprises a volute body and a volute inlet, and the inlet and the outlet of the annular channel are formed in the volute inlet and communicate with the outside. Through the structural design of the annular channel in the cooling disc body, the contact surface between the cooling disc body and a to-be-cooled product is smooth, the contact area is large, cooling mediums can be uniformly distributed and rapidly circulate, and the product is rapidly cooled; and the cooling disc body is reasonable in structural design, simple and convenient in preparation process, good in sealing performance and high in product percent of pass, reworking operation can be greatly reduced, the production cost is reduced, and application to high-precision product cooling is facilitated.

Description

technical field [0001] The invention belongs to the technical field of cooling equipment, and relates to a cooling disc body with an inner annular channel and a preparation method thereof. Background technique [0002] The cooling plate is a common component for product cooling. When the temperature of the processed product is high, placing the product on the cooling plate can quickly cool the product, increase the cooling speed of the product, and directly affect the production efficiency. At the same time, it can also avoid long-term It is easy to change the properties of the product under high temperature conditions for a long time. For example, in the manufacturing process of semiconductor chips, the control of wafer temperature has an important impact on its production process and the properties of wafer products. At the same time, it is required to balance the temperature on the surface of the wafer to avoid the degradation of device performance due to excessive temper...

Claims

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Application Information

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IPC IPC(8): F28D7/04F28F9/18F28G9/00C21D9/00C22F1/04C25D11/04
CPCF28D7/04F28F9/18F28G9/00C22F1/04C21D9/0068C25D11/04
Inventor 姚力军边逸军潘杰王学泽章丽娜
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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