Humidity sensitive capacitor and manufacturing method thereof and humidity measuring equipment

Abstract

The invention discloses a humidity sensitive capacitor manufacturing method. The method comprises the steps of obtaining a substrate, manufacturing a bonding pad and mutually crossed comb finger electrodes on the upper surface of the substrate by adopting an electroplating process, and manufacturing humidity sensitive layers on the upper surface and the side face of the comb finger electrode to obtain a humidity sensitive capacitor, wherein the thickness of the humidity sensitive layer is greater than that of the comb finger electrode. According to the invention, the comb finger electrodes are manufactured in an electroplating mode, the electroplating process is a thick film metal process, the thickness of the comb finger electrodes can be larger than 1 micrometer, the thickness of the comb finger electrodes is increased, the opposite area between the crossed comb finger electrodes is increased so as to increase the basic capacitance and the capacitance variation of the humidity sensitive capacitor, improve the capacitance sensitivity and reduce the design difficulty of the humidity-sensitive capacitance detection circuit, and the manufacturing cost can be reduced through the electroplating mode. The invention further provides a humidity sensitive capacitor and humidity measuring equipment with the advantages.

Description

technical field [0001] The present application relates to the technical field of sensors, in particular to a humidity-sensitive capacitor, a manufacturing method thereof, and a humidity measuring device. Background technique [0002] Humidity sensitive capacitance is an important humidity sensor device, which is widely used in aviation, medical treatment, microelectronics and other fields. [0003] Comb-finger humidity-sensitive capacitor is a planar humidity-sensitive capacitor, and its electrodes are comb-finger electrodes. At present, the comb-finger electrodes are made by thin-film metallization processes such as sputtering or evaporation. Due to technological limitations, the thickness of the comb finger electrodes is less than 1 micron, resulting in the positively small face of the humidity-sensitive capacitor electrode, which makes the basic capacitance and capacitance change of the humidity-sensitive capacitor very small, and the capacitance sensitivity is low, which...

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Problems solved by technology

[0003] Comb-finger humidity-sensitive capacitor is a planar humidity-sensitive capacitor, and its electrodes are comb-finger electrodes. At present, the comb-finger electrodes are made by thin-film metallization processes such as sputtering or evaporation. Due to technological limitations, the thickness of the comb finger electrodes is less than 1 micron, resulting in the positively small face of the humidity-sensitive capacitor electrode, which makes the basic capacitance and capacitance change of the humidity-sensitive capacitor very small, and the capacitance sensitivity is low, which improves the detection circuit of the humidity-sensitive capacitor design difficulty

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