MEMS resonant viscosity sensor
A viscosity sensor, resonant technology, applied in the field of sensors, can solve the problems of limiting the viscosity measurement range of the sensor and the decrease of the resonance structure, etc., and achieve the effects of reducing processing difficulty, improving output accuracy, and improving detection sensitivity
Active Publication Date: 2022-08-09
INSTR TECH & ECONOMY INST P R CHINA
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[0004] However, these three types of micromechanical resonant viscosity sensor structures have common structural problems, that is, most of the existing reports use a flat plate / beam structure to directly contact the liquid, and the intrinsic Q value of the resonator (ie, the zero point Q value of the sensor) is very low, and the maximum value is also low. Only one hundred to one thousand, the Q value of the resonant structure drops sharply with the increase of liquid viscosity, which greatly limits the viscosity measurement range of the sensor
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[0063] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for convenience of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It will be apparent, however, that one or more embodiments may be practiced without these specific details. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.
[0064] All terms (including technical and scientific terms) used herein have the meaning as commonly understood by one of ordinary skill in the art, unless otherwise defined. It should be noted that terms used herein should be construed ...
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The present disclosure provides a microelectromechanical resonant viscosity sensor, comprising a first liquid contact film, an SOI assembly and a second liquid contact film that are bonded and connected in sequence, and the first liquid contact film and the second liquid contact film are related to the SOI assembly Mirror symmetry, the SOI assembly includes a resonator, the first liquid contact film has a first thin film, the second liquid contact film has a second thin film, and the centers of the first thin film and the second thin film are connected to the center of the resonator through a rigid body; A vacuum cavity is formed between a thin film and the second thin film, the resonator is located in the vacuum cavity, and the resonator drives the first thin film and the second thin film to resonate along the direction perpendicular to the plane of the thin film under the action of driving force. Using the present disclosure, the conversion process of viscosity change and resonance energy loss is simple, which is beneficial to improve the detection sensitivity of viscosity, reduce the difficulty of back-end algorithm processing, improve the output accuracy of the sensor, and greatly increase the range of the sensor.
Description
technical field [0001] The present disclosure relates to the technical field of sensors, and in particular, to a microelectromechanical resonance type viscosity sensor. Background technique [0002] The MEMS resonant viscosity sensor mainly realizes the viscosity measurement by measuring the resonance frequency or the resonance quality factor (Q value) of the resonance structure in the fluid damping. The sensor outputs a periodic sinusoidal signal containing resonance characteristics. After the periodic sinusoidal signal is analyzed and processed by impedance or gain, the resonance Q value can be calculated. With the development of sensors in the direction of miniaturization, digitization, intelligence and networking, MEMS resonant viscosity sensors have many advantages such as easy digital integration, compact structure, small size, light weight, low power consumption, and mass production. The viscosity measurement industry has received much attention. [0003] Micromecha...
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IPC IPC(8): G01N11/16
CPCG01N11/16
Inventor 杜晓辉刘帅朱敏杰刘丹王麟琨
Owner INSTR TECH & ECONOMY INST P R CHINA