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Particle Counter Calibration Method and Working Method

A particle counter and calibration method technology, applied in the field of metrology, can solve problems such as optimization of product yield affecting the production efficiency of enterprises, difficulty in effectively controlling the deviation range, inability to meet application requirements, etc. , good consistency

Active Publication Date: 2022-06-24
SUZHOU SUXIN ENVIRONMENT SCI & TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process is cumbersome, and the deviations in different calibration processes will accumulate, it is difficult to effectively control the deviation range of the final calibration results, which is not conducive to the improvement of the calibration effect
It can be seen that for the enterprises that produce particle counters, the existing calibration methods have low calibration efficiency and poor effect, which directly affects the improvement of production efficiency and the optimization of product yield.
The working method of the corresponding existing particle counter also has corresponding defects, the measurement results are not ideal, and cannot meet the application requirements

Method used

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  • Particle Counter Calibration Method and Working Method
  • Particle Counter Calibration Method and Working Method
  • Particle Counter Calibration Method and Working Method

Examples

Experimental program
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Effect test

Embodiment 1

[0038] In the first embodiment of the present invention, as figure 1 As shown, the particle counter of this embodiment is composed of an optical module for providing a working beam, a working area for detection, a photoelectric receiving module for receiving and converting optical signals, and a data processing component. The working area is generally a photosensitive working area and a Mie scattering collector. The optical module includes a laser as a laser light source and its power supply components, and the output light intensity of the laser light source can be adjusted by adjusting the power supply of the laser. In this embodiment, an optical path shaping structure is provided near the output end of the laser, and the Gaussian spot of the output beam of the laser is shaped to obtain a working beam, and the spot formed by the working beam in the photosensitive working area is flat-top uniform. In the light field of the photosensitive working area, through the airflow of ...

Embodiment 2

[0045] like Image 6 As shown, the main difference between the second embodiment and the first embodiment is that the calibration optical module adopts an optical power meter in addition to the CCD camera. In the first step, the standard total value of the optical power in the working area is preset, and the The optical power of the working beam, based on the measurement results, adjust the optical power of the working area to be consistent with the standard total value. Use an optical power meter to calculate the total power, and then feed it back to the laser power supply unit to adjust the power supply of the laser light source, so that the power of the laser after shaping in each optical module remains the same. Because the light intensity of the particle counter is required to be uniform, and the light intensity of each point in the entire working area is the same, the light intensity consistency of the optical module of each particle counter is required to be better. In...

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Abstract

The invention provides a method for calibrating a particle counter, comprising: the first step. calibrating the optical module; the second step. calibrating the photoelectric receiving module; the third step. data collection, calibrating the threshold voltage corresponding to the particle diameter channel; the second step In the method, an optical path turning element is added in the working area to turn the working light beam to cover and irradiate the photosensitive element, measure the output voltage of the preamplifier circuit, and adjust the output voltage to be consistent with the standard value of the preset output voltage. The integrated implementation of the calibration of the optical module and the calibration of the photoelectric receiving module greatly reduces the deviation of the particle counter calibration. The calibration has high efficiency, good accuracy, and is easy to implement. The working method of the particle counter provided by the present invention has corresponding advantages due to the use of the calibration method of the present invention to work after calibrating the particle counter; it can further refine the particle size distribution, raise the particle concentration to a higher level, and promote the development of metering technology. Further development.

Description

technical field [0001] The invention belongs to the technical field of metrology, and particularly relates to a calibration method for calibrating an optical particle counter and a working method using the particle counter. Background technique [0002] Metrology is the science of detection, and it is the use of technical and legal means to achieve unit unity and accurate and reliable measurement. The "Measurement Law of the People's Republic of China" also has relevant provisions on measurement work. If the measurement practices do not meet the requirements, there may also be legal risks. In particular, for the calibration of light scattering laser particle counters (hereinafter referred to as "particle counters"), the National Metrology Technical Specification of the People's Republic of China (JJF) also has clear specification requirements, and the international standard ISO / FDIS 21501-4 also proposes particle counters. Calibration requirements for the counter. The cali...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/14G01N15/02
CPCG01N15/1434G01N15/0211G01N2015/1486G01N2015/1493
Inventor 王少永惠旅锋
Owner SUZHOU SUXIN ENVIRONMENT SCI & TECH CO LTD