Particle Counter Calibration Method and Working Method
A particle counter and calibration method technology, applied in the field of metrology, can solve problems such as optimization of product yield affecting the production efficiency of enterprises, difficulty in effectively controlling the deviation range, inability to meet application requirements, etc. , good consistency
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Embodiment 1
[0038] In the first embodiment of the present invention, as figure 1 As shown, the particle counter of this embodiment is composed of an optical module for providing a working beam, a working area for detection, a photoelectric receiving module for receiving and converting optical signals, and a data processing component. The working area is generally a photosensitive working area and a Mie scattering collector. The optical module includes a laser as a laser light source and its power supply components, and the output light intensity of the laser light source can be adjusted by adjusting the power supply of the laser. In this embodiment, an optical path shaping structure is provided near the output end of the laser, and the Gaussian spot of the output beam of the laser is shaped to obtain a working beam, and the spot formed by the working beam in the photosensitive working area is flat-top uniform. In the light field of the photosensitive working area, through the airflow of ...
Embodiment 2
[0045] like Image 6 As shown, the main difference between the second embodiment and the first embodiment is that the calibration optical module adopts an optical power meter in addition to the CCD camera. In the first step, the standard total value of the optical power in the working area is preset, and the The optical power of the working beam, based on the measurement results, adjust the optical power of the working area to be consistent with the standard total value. Use an optical power meter to calculate the total power, and then feed it back to the laser power supply unit to adjust the power supply of the laser light source, so that the power of the laser after shaping in each optical module remains the same. Because the light intensity of the particle counter is required to be uniform, and the light intensity of each point in the entire working area is the same, the light intensity consistency of the optical module of each particle counter is required to be better. In...
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