Microscopic imaging equipment and nanoscale three-dimensional shape measurement system
A technology for microscopic imaging and three-dimensional topography, applied in microscopes, measuring devices, optics, etc., can solve the problems of low efficiency and large aberration in microscopic imaging, and achieve the effects of accurate measurement, high-quality fast imaging, and simple structure
Active Publication Date: 2021-10-29
板石智能科技(武汉)有限公司
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[0005] In view of this, this application provides a microscopic imaging device and a nanoscale three-dimensional shape measurement system to solve the technical problems of large aberration and low efficiency of phase measurement microscopic imaging
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[0047] Preferred embodiments of the application are described in detail below in conjunction with the accompanying drawings, wherein the drawings constitute a part of the application and together with the embodiments of the application are used to explain the principles of the application and are not intended to limit the scope of the application.
[0048] In the description of the present application, "plurality" means two or more, unless otherwise specifically defined.
[0049]Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the e...
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The invention relates to a microscopic imaging device and a nanoscale three-dimensional shape measurement system. The microscopic imaging device comprises a microscope, a 4F system and a camera. The 4F system comprises two lens groups and an electric control zoom lens; the two lens groups are respectively a first lens group and a second lens group; the two lens groups are Fourier transform objective lenses with inverse long-distance structures; the lens of the microscope, the first lens group, the electric control zoom lens, the second lens group and the lens of the camera are sequentially arranged on the same optical axis; the first lens group and the second lens group are symmetrically arranged on two sides of the electric control zoom lens; the image plane of the microscope is located on the front focal plane of the first lens group, the electric control zoom lens is located on the rear focal plane of the first lens group and the front focal plane of the second lens group, and the camera is located on the rear focal plane of the second lens group. The invention has the technical effects of small imaging aberration and high efficiency.
Description
technical field [0001] The present application relates to the technical field of microscopic imaging, in particular to a microscopic imaging device and a nanoscale three-dimensional shape measurement system. Background technique [0002] In the field of industrial manufacturing, the three-dimensional shape information of objects is of great significance to the control of manufacturing process. When light is irradiated on an object, the three-dimensional shape of the object will affect the wavefront and phase distribution of the light wave. Therefore, the depth information of the object can be obtained by calculating the phase. However, all current optical signal detection devices, such as CMOS-type and charge-coupled device-type cameras, can only record light intensity, not phase information. Therefore, a specific method must be used to demodulate the phase information from the intensity detection signal. Optical energy transfer equation technique is a typical optical pha...
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IPC IPC(8): G02B21/02G02B21/04G02B21/36G01B11/24
CPCG02B21/02G02B21/025G02B21/04G02B21/365G02B21/361G01B11/24
Inventor 吴征宇
Owner 板石智能科技(武汉)有限公司