Ozone gas concentration control system
A control system, ozone technology, applied in control/regulation system, multiple fluid ratio control, ratio control, etc., can solve the problems of low ozone concentration and high energy consumption, and achieve the effect of continuous and stable output
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Embodiment 1
[0043] The structure schematic diagram of the concentration control system of the ozone gas of the present embodiment is as figure 2 As shown, the ozone gas concentration control system of this embodiment includes an ozone generation system, an ozone dilution system and an ozone detection system. Among them, the ozone generation system includes oxygen 5, screw valve 6, mass flow controller 7 and ozone generator 8; the ozone dilution system includes zero gas 1, screw valve 2, mass flow controller 3, mass flow controller 4, First dilution bottle 9, needle valve 10, exhaust gas discharge port 11, first restrictor tube 12, screw valve 13, pressure gauge 14, second dilution bottle 15, needle valve 16, exhaust gas discharge port 17, screw valve 18 , a pressure gauge 19, a second restrictor tube 20 and a first screw valve 21; the ozone detection system includes a flow tube 22, an exhaust gas 23, an ozone analyzer 24 and other analyzers 25.
[0044] In this embodiment, zero air 1 is...
experiment example 1
[0059] Adopt the concentration control system of embodiment 1 to carry out the ozone concentration adjustment experiment, when starting to operate, default all screw valves (2,6,13,18,21) and needle valves (10,16) are closed state, all tail gas discharges Ports (11, 17, 23) are all open, and the specific operation steps are as follows: open the screw valve 2 of zero gas 1, open the screw valve 6 of oxygen 5, and respectively set the flow rate of MFC (3, 4, 7) to 5L / min, 10L / min, 0.5L / min; turn on the ozone analyzer 24, after the instrument is stable, start to automatically record the ozone concentration in the system, because the zero gas does not contain ozone, so run for 3h, the concentration is close to 0;
[0060] Turn on the ozone generator 8, set the ozone generation rate to 20%, and set the rotameter flow rate on the ozone generator to be slightly higher than 0.5L / min. It should be noted that the maximum value of ozone generation rate is 100%, although lowering the gene...
experiment example 2
[0065] This experimental example is the same as experimental example 1, and the concentration control system of embodiment 1 is used to carry out the ozone concentration adjustment experiment. In this experimental example, the gas in the dilution bottle is changed in a short time by rapidly changing the switching degree of the needle valve (10, 16). Pressure, complete multiple dilution concentration changes.
[0066] O in this experimental example 3 The concentration varies with time as Figure 5 shown by Figure 5 It can be known that, in the 4 dilution concentration points tested, the average concentration is respectively 169. ± 4.9 ( Figure 5 The middle abscissa is from 3.8-22.8h, totaling 19h data), 86.0±1.9 (23.4-25.4h, totaling 2h data), 65.4±0.6 (25.5-27.5h, totaling 2h data), 34.4±0.5 (between 27.6-29.6h, total data within 2h). The above test results show that the concentration control system in Example 1 is used for ozone dilution, the stability of the system is ...
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