Process for batch production of micro-fluidic chips through sand blasting and sand carving

Abstract

The invention discloses a process for batch production of micro-fluidic chips through sand blasting and sand carving. The process specifically comprises the following steps: S1, raw materials: cleaning and drying the raw materials; s2, gluing: coating or packaging a photosensitive film on the surface of the material; s3, photoetching: photoetching a micro-fluidic channel pattern needing sand carving on the surface of the material; s4, pattern development: exposing the surface of the raw material through a pattern appearance method; s5, sand blasting: mounting the material on a sand blasting machine through a jig to be subjected to sand blasting; s6, checking: checking the product after sand blasting for qualification or not. The process for batch production of micro-fluidic chips by sand blasting and sand carving disclosed by the invention is safe and environment-friendly. In this way, highly toxic and toxic chemical substances are replaced with sand grains, a traditional liquid medicine soaking etching mode is replaced with jet etching, and the method is safer, more environmentally friendly, low in cost and capable of achieving mass production. According to the process, the technical effect of rapidly processing the microfluidic patterns in batches in the closed working cavity can be achieved.

Description

technical field [0001] The invention relates to the technical field of microfluidic chips, in particular to a process for mass production of microfluidic chips by sandblasting and sand engraving. Background technique [0002] The microfluidic chip (miniature laboratory) is aimed at the traditional macroscopic laboratory. The traditional experiment is completed through the cooperation of some relatively large experimental equipment. The experiment occupies a relatively large space and consumes more reagents. It takes a long time, especially for some rare and precious reagents, and the cost of doing experiments with traditional experimental methods is very high. The role of the microfluidic chip is to miniaturize and integrate the traditional macroscopic experimental system, and use relevant knowledge of micro-electromechanical systems, fluid mechanics, chemistry, biology, etc., to integrate some traditional detections in a very small system. , to speed up the detection time,...

AI Technical Summary

Problems solved by technology

[0004] The invention discloses a process for mass production of microfluidic chips by sand blasting and sand engraving, which aims to solve the problem that the unit cost of the chip production process is very high, and the equipment used in the production is required to be high-precision and the production environment is a dust-free environment. , It is difficult to realize and requires very high quality of operators, so the overall implementation cost is high. At present, it is only used for sample trial production and zero-time test projects in the design stage, and cannot be implemented in mass production. The biggest pain point of this process at present is that the used Chemical agents are highly toxic and toxic substances such as hydrofluoric acid / sulfuric acid, which are extremely harmful to the environment and operators, and are difficult to recycle. The technology of glass microfluidics cannot be promoted, so glass microfluidics are very rare at this stage. technical problem

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