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Laser oscillator

A technology of laser oscillator and laser medium, applied in lasers, laser parts, laser parts and other directions, can solve the problems of large-scale devices and rising costs.

Pending Publication Date: 2022-01-04
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if a thick and large part is used as the base of the resonator in order to increase rigidity, it will increase the size of the device and increase the cost

Method used

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  • Laser oscillator
  • Laser oscillator
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Experimental program
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Embodiment Construction

[0020] figure 1 It is a schematic diagram of a laser device 10 equipped with a laser oscillator 12 according to an embodiment, and a processing device 80 for processing using a laser beam output from the laser device 10 . The laser device 10 and the processing device 80 are fixed on a common base 100 . The common base 100 is, for example, the ground.

[0021] The laser device 10 includes a stand 11 fixed on a common base 100 and a laser oscillator 12 supported on the stand 11 . The processing device 80 includes a beam shaping optical system 81 and a workbench 82 . The object to be processed 90 is held on the table 82 . The beam shaping optical system 81 and the workbench 82 are fixed on the common base 100 . The beam profile of the laser beam output from the laser oscillator 12 is shaped by the beam shaping optical system 81 and is incident on the object 90 to be processed.

[0022] figure 2 is a cross-sectional view of the laser oscillator 12 including the optical axis...

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PUM

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Abstract

The invention provides a laser oscillator capable of suppressing an increase in size and cost of a device and suppressing an optical axis offset of an optical resonant cavity. A laser medium gas is contained in the chamber. The discharge electrode generates discharge in the chamber. An optical resonator having an optical axis of a region where discharge is generated by a discharge electrode is held in a resonator base disposed in the chamber. The laser oscillator is provided with a temperature difference reduction structure that reduces a temperature difference between a first surface facing the discharge electrode and a second surface facing the opposite side of the discharge electrode, among the surfaces of the resonator base.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2020-115641 filed on July 3, 2020. The entire content of this Japanese application is incorporated in this specification by reference. technical field [0002] The invention relates to a laser oscillator. Background technique [0003] Optical resonators used in laser oscillators have a pair of resonator mirrors that confine light between the resonator mirrors to generate stimulated emission. If the optical axes of a pair of resonator mirrors deviate from each other, the laser output will drop. In order to avoid a drop in laser output, it is very important to prevent the optical axes of the pair of resonator mirrors from shifting from each other. In order to prevent the optical axes from shifting from each other, a structure in which a pair of resonator mirrors are fixed to the resonator base may be used. [0004] Patent Document 1 below discloses a laser oscillator in which a container for ac...

Claims

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Application Information

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IPC IPC(8): H01S3/02H01S3/038H01S3/04H01S3/08
CPCH01S3/02H01S3/0384H01S3/08H01S3/0404H01S3/041
Inventor 河村让一田中研太
Owner SUMITOMO HEAVY IND LTD