Double-beam combining method and device for laser microscopic detection
A technology of microscopic detection and combination device, which is used in measurement devices, material analysis by optical means, instruments, etc., can solve the problems of quantity, uncontrollable energy, low flexibility, etc., to achieve the effect of biochip scanning
Pending Publication Date: 2022-01-14
BEIJING UNIV OF TECH +1
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[0002] Parallel multi-laser beams first appeared in the field of laser manufacturing. As a new and efficient manufacturing method, it has rapidly made great progress in laser processing, cleaning, and marking. Most of the parallel processing of multi-laser beams adopts the DOE method. For processing, this processing technology can generate multiple beams, but the position, quantity, and energy of the beams cannot be adjusted, and the flexibility is low. Programmable parallel processing modules need to be configured
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[0022] The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
[0023] Embodiments of the present invention propose a method and device for combining two beams for laser microscopic detection. The double-beam combination method adopts the parallel arrangement design of two-way lasers, and the two-way lasers enter their respective light entrances in parallel with each other, and the beam adjustment, shaping, deflection and beam combination are completed in the beam combination device, so that the beam after combination Dual-channel lasers enter the microscope system accurately and realize fast scanning and precise detection.
[0024] Dual beam combiner (such as figure 1 and figure 2 ) mainly includes: double beam combining unit housing, cover plate, fixing screw, dual laser entrance, polarizing device, beam shaping device, deflection mirror, deflection adjusting device, beam comb...
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The invention discloses a double-beam combining method and device for laser microscopic detection. The method comprises the following steps that parallel arrangement design and independent adjustment of two paths of laser are conducted; polarization state adjustment, beam shaping optimization, deflection angle adjustment and laser beam combination and adjustment of the two paths of laser beams are conducted; and the reflected light of the sample is split to a CCD, so that internal imaging and observation of the sample in a microscopic detection process are realized. The device comprises a double-beam combining unit shell, a cover plate, a fixing screw, a double-path laser inlet, a polarization device, a beam shaping device, a deflecting mirror, a deflection adjusting device, a beam combining device, a combined laser adjusting device, a spectroscope, a CCD, a combined laser outlet and the like. Through shaping, deflection and adjustment of two paths of laser, a laser microscopic detection system can be supported to carry out rapid scanning and accurate detection on microstructures and micro devices such as chips and the like.
Description
technical field [0001] The invention relates to the fields of detection technology, laser irradiation technology and microscopic imaging technology, in particular to a method and device for combining multiple light source beams during laser microscopic detection. Background technique [0002] Parallel multi-laser beams first appeared in the field of laser manufacturing. As a new and efficient manufacturing method, it has rapidly made great progress in laser processing, cleaning, and marking. Most of the parallel processing of multi-laser beams adopts the DOE method. For processing, this processing technology can generate multiple beams, but the position, quantity, and energy of the beams cannot be adjusted, and the flexibility is low. Programmable parallel processing modules need to be configured. Later, in the field of laser ranging, it was discovered that the multi-channel laser parallel ranging technology can simultaneously measure multiple points of the measured target, ...
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IPC IPC(8): G01N21/956G01N21/01
CPCG01N21/956G01N21/01G01N2021/95638
Inventor 季凌飞薛岩郑锦灿
Owner BEIJING UNIV OF TECH