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Optical system

A technology of optical system and optical path, which is applied in the field of optical system, can solve the problem of low efficiency of laser direct writing and achieve the effect of improving efficiency

Pending Publication Date: 2022-01-28
SHENZHEN LUBANG TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Generally, the efficiency of laser direct writing is relatively low, how to improve the production efficiency of diffractive optical elements has become a current research hotspot

Method used

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Embodiment 1

[0032] This embodiment discloses an optical system, including:

[0033] Exposure light path and alignment light path.

[0034] On the exposure optical path, a mask plate, a template and a sample substrate are sequentially arranged; the sample substrate is provided with a photosensitive material for converting or duplicating the polarization information of the template through exposure and placed on a displacement stage; The mask plate and the template are in a parallel relationship perpendicular to the light path. In this embodiment, the so-called "polarization information conversion or replication" refers to the conversion or replication of the polarization information of the template, which is related to the template and the incident light; the template usually uses a half-wave or 1 / 4-wave geometric phase device to meet the specific requirements of the incident light After passing through the template, diffraction will occur. When the diffracted lights of different orders o...

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Abstract

The invention relates to the technical field of optical element preparation, and discloses an optical system so as to improve the manufacturing efficiency of a diffractive optical element and ensure the product reliability. The system comprises an exposure light path and an alignment light path, a mask plate, a template and a sample substrate are arranged on the exposure light path in sequence; the sample substrate is provided with a photosensitive material which is used for converting or copying polarization information of the template through exposure and is arranged on a displacement table; the mask plate and the template are in a parallel relation perpendicular to the light path; and the alignment light path is also provided with an alignment light source which does not react with the photosensitive material in the sample substrate, an alignment plate disposed between the alignment light source and the sample substrate, and a first control host. The first control host is connected with a first image acquisition device, and in the process that the first image acquisition device acquires a second exposure light spot image in which the polarization information generated by the template is filtered, a second linear polaroid used for filtering the polarization information generated by the template is deployed between the first image acquisition device and the sample substrate.

Description

technical field [0001] The invention relates to the technical field of optical element preparation, in particular to an optical system. Background technique [0002] Laser direct writing is one of the main technologies for making diffractive optical elements. It uses variable intensity laser beams to implement variable dose exposure on the resist material on the surface of the substrate. After development, the required relief contour is formed on the surface of the resist layer. The precision can reach sub-micron level. [0003] Generally, the efficiency of laser direct writing is relatively low, and how to improve the production efficiency of diffractive optical elements has become a current research hotspot. Contents of the invention [0004] The purpose of the invention is to disclose an optical system to improve the production efficiency of diffractive optical elements and ensure product reliability. [0005] To achieve the above object, the optical system disclosed ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70191G03F7/7015G03F7/70483
Inventor 杨阳代林茂欧阳君怡刘新阳黄晖辉李晓春廖莎
Owner SHENZHEN LUBANG TECH CO LTD
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