Transverse time-of-flight cluster mass selector and use method thereof

Abstract

The invention discloses a transverse time-of-flight cluster mass selector and a use method thereof, and adopts a pair of parallel plate electrodes to replace a complex structure consisting of three groups of electrodes, namely a cluster ion forward deflection region, a free flight region and a reverse deflection region, in an existing universal cluster time-of-flight mass selector, so that the structure of the selector is greatly simplified. A simple linear relation exists between the cluster mass selected by the selector and the acceleration and deceleration pulse voltage amplitude applied to the parallel plate electrode, so that the cluster mass can be selected by simply adjusting the pulse voltage amplitude, the selector is visual, simple and easy to debug and operate, the mass resolution is constant, and the calibration is rapid. By reasonably setting the time logic of the voltage pulse, the cluster mass selection can reach a high passing rate of 50%. In addition, the electric field distribution structure restrains the ions from converging towards the axis, and compared with the electric field distribution configuration, causing ion divergence, of the current universal cluster time-of-flight mass selector, the quality of the beam is better improved.

Description

technical field [0001] The invention belongs to the field of atomic and molecular physics and nano science and technology, and relates to a device widely used in the research of cluster physics and chemical properties and the controllable deposition of cluster beams, specifically a lateral time-of-flight cluster mass selector and its use method . Background technique [0002] The size selection of cluster beams and the real-time measurement of cluster size distribution are very critical in the basic research of clusters and the process of preparing cluster-assembled nanostructure materials and devices by cluster beam deposition. An integral part of the beam system. [0003] The size selection of cluster beams can be divided into two categories: neutral clusters and ionized clusters. The size selection of neutral clusters mainly uses aerodynamic lenses, wheel dividers, etc., while the devices used for size selection of ionized clusters mainly include quadrupole mass filters...

AI Technical Summary

Problems solved by technology

The mass selection range of the quadrupole mass filter is limited, and generally can only achieve the size selection of small clusters less than a few thousand atomic weights

However, the electrode structure of this mass selector is relatively complex, which requires high quality of the cluster beam and high construction cost; difficult to use

Moreover, its electric field distribution structure causes the cluster ions to tend to diverge off-axis in the flight path, resulting in a decrease in the quality of the cluster beam after selection.

Images