Transverse time-of-flight cluster mass selector and use method thereof

A technology of mass selection and time grouping, which is applied in the fields of atomic and molecular physics and nanoscience, can solve the problems of limited mass selection range of quadrupole mass filter, high quality requirements of cluster beams, and reduced quality of cluster beams, etc. Intuitive and simple to achieve debugging and operation, conducive to beam quality, and constant mass resolution

Pending Publication Date: 2022-01-28
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The mass selection range of the quadrupole mass filter is limited, and generally can only achieve the size selection of small clusters less than a few thousand atomic weights
However, the electrode structure of this mass selector is relatively complex, which requires high quality of the cluster beam and high construction cost; difficult to use
Moreover, its electric field distribution structure causes the cluster ions to tend to diverge off-axis in the flight path, resulting in a decrease in the quality of the cluster beam after selection.

Method used

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  • Transverse time-of-flight cluster mass selector and use method thereof
  • Transverse time-of-flight cluster mass selector and use method thereof
  • Transverse time-of-flight cluster mass selector and use method thereof

Examples

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Effect test

Embodiment 1

[0030] like figure 1 and 3 As shown, a transverse time-of-flight cluster mass selector, the mass selector includes parallel plate electrodes 1 and 2 parallel to each other, an entrance slit plate 3 and an exit slit plate 4 arranged in parallel, the parallel plate electrodes and The slit plates are vertical and fit together, and the mass selector is installed in the vacuum chamber 19 . The materials of the parallel plate electrode, the entrance slit plate 3 and the exit slit plate 4 are all aluminum; the parallel plate electrode is a rectangular plate with a length of 740 mm, a width of 100 mm, and a thickness of 3 mm; two parallel plate electrodes are placed in parallel, and the inside of the plate is The distance between the surfaces is 150 mm, and electrical insulation is maintained between the plates; the entrance slit plate 3 and the exit slit plate 4 are placed at both ends of the long side of the parallel plate, perpendicular to the electrode plane of the parallel plate...

Embodiment 2

[0037] like figure 1 and 3As shown, a transverse time-of-flight cluster mass selector, the mass selector includes parallel plate electrodes 1 and 2 parallel to each other, an entrance slit plate 3 and an exit slit plate 4 arranged in parallel, the parallel plate electrodes and The slit plate is vertical and fitted, and the mass selector is installed in the vacuum chamber. The materials of the parallel plate electrode, the entrance slit plate 3 and the exit slit plate 4 are all stainless steel; the parallel plate electrode is a rectangular plate with a length of 600 mm, a width of 120 mm, and a thickness of 2 mm; two parallel plate electrodes are placed in parallel, and the inside of the plate is The distance between the surfaces is 200 mm, and electrical insulation is maintained between the plates; the entrance slit plate 3 and the exit slit plate 4 are placed at both ends of the long side of the parallel plate, perpendicular to the electrode plane of the parallel plate, and ...

Embodiment 3

[0044] like figure 1 and 3 As shown, a transverse time-of-flight cluster mass selector, the mass selector includes parallel plate electrodes 1 and 2 parallel to each other, an entrance slit plate 3 and an exit slit plate 4 arranged in parallel, the parallel plate electrodes and The slit plates are vertical and fit together, and the mass selector is installed in the vacuum chamber 19 . The materials of the parallel plate electrode, the entrance slit plate 3 and the exit slit plate 4 are all aluminum; the parallel plate electrode is a rectangular plate with a length of 250 mm, a width of 40 mm, and a thickness of 2 mm; two parallel plate electrodes are placed in parallel, and the inside of the plate is The distance between the surfaces is 50 mm, and electrical insulation is maintained between the plates; the entrance slit plate 3 and the exit slit plate 4 are placed at the two ends of the long side of the parallel plate, perpendicular to the electrode plane of the parallel plat...

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Abstract

The invention discloses a transverse time-of-flight cluster mass selector and a use method thereof, and adopts a pair of parallel plate electrodes to replace a complex structure consisting of three groups of electrodes, namely a cluster ion forward deflection region, a free flight region and a reverse deflection region, in an existing universal cluster time-of-flight mass selector, so that the structure of the selector is greatly simplified. A simple linear relation exists between the cluster mass selected by the selector and the acceleration and deceleration pulse voltage amplitude applied to the parallel plate electrode, so that the cluster mass can be selected by simply adjusting the pulse voltage amplitude, the selector is visual, simple and easy to debug and operate, the mass resolution is constant, and the calibration is rapid. By reasonably setting the time logic of the voltage pulse, the cluster mass selection can reach a high passing rate of 50%. In addition, the electric field distribution structure restrains the ions from converging towards the axis, and compared with the electric field distribution configuration, causing ion divergence, of the current universal cluster time-of-flight mass selector, the quality of the beam is better improved.

Description

technical field [0001] The invention belongs to the field of atomic and molecular physics and nano science and technology, and relates to a device widely used in the research of cluster physics and chemical properties and the controllable deposition of cluster beams, specifically a lateral time-of-flight cluster mass selector and its use method . Background technique [0002] The size selection of cluster beams and the real-time measurement of cluster size distribution are very critical in the basic research of clusters and the process of preparing cluster-assembled nanostructure materials and devices by cluster beam deposition. An integral part of the beam system. [0003] The size selection of cluster beams can be divided into two categories: neutral clusters and ionized clusters. The size selection of neutral clusters mainly uses aerodynamic lenses, wheel dividers, etc., while the devices used for size selection of ionized clusters mainly include quadrupole mass filters...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J49/40H01J49/42
CPCH01J49/40H01J49/421
Inventor 刘飞韩民
Owner NANJING UNIV
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