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Hydrophobic and oleophobic coating as well as preparation method and product thereof

A hydrophobic and oleophobic coating technology, which can be used in coatings, metal material coating processes, gaseous chemical plating, etc., and can solve problems such as limiting the development and application of hydrophobic and oleophobic coatings.

Pending Publication Date: 2022-02-18
JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This undoubtedly limits the development and application of this type of hydrophobic and oleophobic coating technology.

Method used

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  • Hydrophobic and oleophobic coating as well as preparation method and product thereof
  • Hydrophobic and oleophobic coating as well as preparation method and product thereof
  • Hydrophobic and oleophobic coating as well as preparation method and product thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0086] Put the alcohol-wiped glass into the reaction chamber of the plasma chamber, and continuously evacuate the reaction chamber to make the vacuum degree reach 20 millitorr; feed the plasma source gas helium, the flow rate is 50 sccm, and the internal temperature of the chamber is 55 ℃, turn on the plasma discharge to pretreat the substrate, the discharge power supply adopts a pulse bias power supply in constant power mode, the power is 500W, the pulse frequency is 50KHz, the duty cycle is 10%, and the discharge time is 30 minutes.

[0087] Then the monomer raw material is vaporized and introduced into the reaction chamber. The internal temperature of the chamber is 45°C, the vaporization temperature of the monomer is 90°C, the flow rate of helium is 50 sccm, the pressure is constant at 80 millitorr, and the flow rate of the monomer is 350ul / min. In the coating stage For pulse discharge, the discharge power supply adopts a pulse bias power supply in constant power mode, with...

Embodiment 2

[0092] Put the nylon watch strap into the reaction chamber of the plasma chamber, and continuously evacuate the reaction chamber to make the vacuum degree reach 20 millitorr; inject the plasma source gas helium, the flow rate is 50 sccm, and the internal temperature of the chamber is 55 ℃, turn on the plasma discharge to pretreat the substrate, the discharge power supply adopts a pulse bias power supply in constant power mode, the power is 500W, the pulse frequency is 50KHz, the duty cycle is 10%, and the discharge time is 30 minutes.

[0093] monomer raw material HT 170 is vaporized and introduced into the reaction chamber. The internal temperature of the chamber is 50°C, the vaporization temperature of the monomer is 100°C, the flow rate of helium is 50 sccm, the pressure is constant at 80 millitorr, the flow rate of the monomer is 300ul / min, and the coating stage is pulse discharge. , The discharge power supply adopts the pulse bias power supply under constant power mode, ...

Embodiment 3

[0096] Place the alcohol-wiped glass in the vacuum coating chamber, and continuously evacuate the reaction chamber to make the vacuum degree reach 80 mTorr; inject the plasma source gas helium, the flow rate is 50 sccm, and the internal temperature of the chamber is 55 ° C. Turn on the plasma discharge to pretreat the substrate. The discharge power supply is a pulse bias power supply in constant power mode, with a power of 500W, a pulse frequency of 50KHz, a duty cycle of 10%, and a discharge time of 30 minutes.

[0097] The monomer raw material bishydroxy perfluoropolyether derivative was then D and perfluoropolyether The solutions obtained by mixing HT170 according to different mass ratios are gasified after mixing, and then introduced into the reaction chamber after gasification. Millitorr, monomer flow rate is 400ul / min, pulse discharge is used in the coating stage, the discharge power supply adopts a pulse bias power supply in constant power mode, the power is 460W, th...

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Abstract

The invention discloses a hydrophobic and oleophobic coating as well as a preparation method and a product thereof, and the hydrophobic and oleophobic coating is formed by depositing perfluoropolyether or perfluoropolyether derivatives on the surface of a substrate in a PECVD (Plasma Enhanced Chemical Vapor Deposition) manner, so that the hydrophobic and oleophobic performance of the surface of the substrate is improved through the perfluoropolyether or perfluoropolyether derivative coating.

Description

technical field [0001] The present invention relates to the field of surface modification, and further relates to a hydrophobic and oleophobic coating formed by plasma chemical vapor deposition technology and its preparation method and product. Background technique [0002] Nowadays, hydrophobic and oleophobic products are constantly favored by consumers, and more and more researches on hydrophobic and oleophobic have been reported one after another. Among them, the most studied compounds are perfluorinated compounds (PFASs), which have been widely used in industrial production due to their excellent thermal stability, hydrophobicity and oleophobicity. [0003] However, PFASs have the characteristics of refractory degradation, easy bioaccumulation, and high toxicity, and have become a new type of pollutant. Most of the degradation products of PFASs are perfluorooctanoic acid (PFOA) and perfluorooctane sulfonic acid (PFOS), and perfluorooctanoic acid (PFOA) and perfluoroocta...

Claims

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Application Information

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IPC IPC(8): C23C16/513
CPCC23C16/513
Inventor 宗坚
Owner JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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