Monocrystalline silicon structure layer shear modulus on-line test structure and test method
A shear modulus, online testing technology, applied in measuring devices, instruments, scientific instruments, etc., can solve the problems of high cost, unsatisfactory online testing, slow measurement speed, etc., to achieve low cost, fast measurement speed, simple structure Effect
Active Publication Date: 2022-02-18
HOHAI UNIV
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Problems solved by technology
[0003] Shear modulus is an important parameter to measure the motion characteristics of MEMS devices such as micromirrors. The existing shear modulus measurement technology often needs to use special optical equipment to apply force to the sample and measure it by optical interference. The measurement speed of the method is slow, the cost is high, and it does not meet the requirements of online testing
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[0018] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.
[0019] like Figure 1 to Figure 3 As shown, the present invention provides a single crystal silicon structure layer shear modulus online testing structure, based on the SOI process, its main structure includes a single crystal silicon torsion beam 3, a first anchor region 4, a second anchor region 5, a first Metal electrode 6 , single crystal silicon drive beam 7 , single crystal silicon upper plate 8 , single crystal silicon lower plate 9 , lower plate lead 10 and second metal electrode 11 . Wherein the first anchor region 4 , the second anchor region 5 , the single crystal silicon lower plate 9 and the lower plate lead 10 are located on the insulating layer 2 , and the insulating layer 2 is lo...
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The invention discloses a monocrystalline silicon structure layer shear modulus on-line test structure. The monocrystalline silicon structure layer shear modulus online test structure comprises a monocrystalline silicon upper pole plate and a monocrystalline silicon lower pole plate which are arranged in the vertical direction; the monocrystalline silicon upper pole plate and the monocrystalline silicon lower pole plate are the same in shape and size; the monocrystalline silicon upper pole plate is horizontally connected with one end of a monocrystalline silicon driving beam; the other end of the monocrystalline silicon driving beam is horizontally and vertically connected with the central position of a torsion beam; the left and right ends of the torsion beam are respectively provided with a first anchor area and a second anchor area; the upper surface of the second anchor area is provided with a first metal electrode; the monocrystalline silicon lower polar plate is connected with a lower polar plate lead; and the tail end of the lower polar plate lead is provided with a second metal electrode. The invention further discloses a monocrystalline silicon structure layer shear modulus on-line test method. According to the monocrystalline silicon structure layer shear modulus on-line test structure and test method, the shear modulus is measured by using an electrical testing means, the defects of an optical interference measuring method can be overcome. The on-line test structure and method have the advantages of being simple in structure, high in measuring speed and low in cost.
Description
technical field [0001] The invention relates to an on-line test structure and a test method for the shear modulus of a single crystal silicon structural layer, which is based on the SOI process and belongs to the technical field of micro-electromechanical systems and material parameter tests. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) is a multi-disciplinary frontier research field developed on the basis of microelectronics technology. Its basic characteristics are miniaturization, high integration and high-precision batch manufacturing. There are a wide variety of MEMS products, such as MEMS accelerometers, MEMS gyroscopes, MEMS pressure sensors, MEMS microphones, micromirrors, micromotors, etc. These products are widely used in consumer electronics, wearable devices, smart homes, environmental monitoring and other fields . SOI processing technology is one of the mainstream processing technologies of MEMS products...
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IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 刘海韵陈嘉琪周思源平学伟
Owner HOHAI UNIV