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Fe-pt-bn-based sputtering target and method for manufacturing same

A manufacturing method and fe-pt-bn technology, which are applied in sputtering coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of difficulty in manufacturing high-density sintered body, generation of particles, and reduction of product yield. and other problems to achieve the effect of reducing the number of particles

Pending Publication Date: 2022-02-18
TANAKA PRECIOUS METAL IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

BN exhibits excellent performance as a lubricant, but its sinterability is poor, so there are problems such as difficulty in producing a high-density sintered body, generation of particles during sputtering, reduction in product yield, and poor machinability, etc.
[0007] As mentioned above, Patent Documents 1 to 3 disclose the production method of hot pressing and hot isostatic pressing of the mixed powder obtained by mixing Fe powder, Pt powder and BN powder with a media agitation mill at 300 rpm for 2 hours. The sputtering target does not reduce the particle count

Method used

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  • Fe-pt-bn-based sputtering target and method for manufacturing same
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  • Fe-pt-bn-based sputtering target and method for manufacturing same

Examples

Experimental program
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Effect test

Embodiment 1

[0078] In order to form the composition of Fe-31.5Pt-30BN (ratio is mole %, Fe is the balance. It is the same in the following examples and comparative examples.) 190.28 g of Fe powder with an average particle diameter of 7 μm, an average particle diameter of 543.83 g of 1 μm Pt powder and 65.90 g of BN powder with an average particle diameter of 4 μm were put into a media agitation mill (medium: zirconia balls) and mixed at 150 rpm for 4 hours to obtain a mixed powder. The mixed powder was classified by a sieve with a mesh size of 300 μm, and the passing powder was sintered under conditions of sintering pressure 66 MPa, sintering temperature 900° C., and retention time 1 hour to obtain a sintered body.

[0079] After measuring the relative density of the sintered body, the sintered body was processed into a sputtering target, and the number of particles was measured. Next, a sample piece of about 4 mm square was cut out from the sputtering target, and the particle size distri...

Embodiment 2

[0081] In order to form the composition of Fe-30Pt-30BN-10C, 143.73 g of Fe powder with an average particle diameter of 7 μm, 502.08 g of Pt powder with an average particle diameter of 1 μm, 63.88 g of BN powder with an average particle diameter of 4 μm, and 10.30 g of C powder is dropped into a media agitated mill (medium: zirconia balls), and mixed at 150 rpm for 4 hours to obtain a mixed powder. In addition, a sintered body is produced in the same manner as in Example 1, and after the relative density is measured, the sintered body is It was processed into a sputtering target, the number of particles was measured, and the particle size distribution of the residue after dissolving aqua regia was measured using a sample piece cut out from the sputtering target. The relative density was 92.9%, the number of particles was 38, the D90 of the residue dissolved in aqua regia was 3.41 μm, and the fine particles smaller than 1 μm were 28.26%. In addition, a metal microscope observat...

Embodiment 3

[0083] In order to form the composition of Fe-30Pt-30BN-10C, 143.73 g of Fe powder with an average particle diameter of 7 μm, 502.08 g of Pt powder with an average particle diameter of 1 μm, 63.88 g of BN powder with an average particle diameter of 4 μm, and 10.30 g of C powder is dropped into a media agitated mill (medium: zirconia balls), and mixed at 150 rpm for 2 hours to obtain a mixed powder. In addition, a sintered body is produced in the same manner as in Example 1, and after the relative density is measured, the sintered body is It was processed into a sputtering target, the number of particles was measured, and the particle size distribution of the residue after dissolving aqua regia was measured using a sample piece cut out from the sputtering target. The relative density was 95.6%, the number of particles was 83, the D90 of the residue dissolved in aqua regia was 5.18 μm, and the fine particles smaller than 1 μm were 12.76%.

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Abstract

Provided is a Fe-Pt-BN-based sputtering target which has a high relative density and can generate particles in a reduced amount. A Fe-Pt-BN-based sputtering target having such a property that, when a measurement is carried out by the below-mentioned procedure, a residue remaining after the dissolution of the sputtering target in aqua regia has a particle size distribution that D90 is 5.5 [mu]m or less and the amount of fine particles each having a particle size of less than 1 [mu]m is 35% or more. Procedure: (1) an about 4-square-millimeter specimen was cut out from the sputtering target and is then ground to prepare a ground product; (2) the ground product is sieved using sieves respectively having mesh opening sizes of 106 [mu]m and 300 [mu]m, and a powder that has passed through the 300-[mu]m sieve and has remained on the 106-[mu]m sieve is collected; (3) the powder is immersed in aqua regia that is heated to 200 DEG C to prepare a residue-containing solution in which the powder is dissolved; (4) the residue-containing solution is filtrated through a paper filter No. 5 A as prescribed in JIS P 3801, and then a residue on the paper filter is dried at 80 DEG C to prepare a residue powder; (5) the residue powder is dispersed in water containing a surfactant to prepare a sample solution; and (6) the sample solution is applied to a particle size analyzer to measure a particle size distribution.

Description

technical field [0001] The present invention relates to a BN-containing sputtering target for producing a magnetic thin film and a manufacturing method thereof, in particular to a Fe-Pt-BN-based sputtering target containing Fe, Pt and BN (boron nitride) and a manufacturing method thereof. Background technique [0002] As a sputtering target for the production of granular magnetic thin films of magnetic recording media such as hard disk drives, the main component is Fe or Co, which is a ferromagnetic metal, and SiO is used. 2 Sintered bodies of oxides, B (boron), C (carbon), BN (boron nitride) and other non-magnetic materials. BN exhibits excellent performance as a lubricant, but its sinterability is poor. Therefore, there are problems such as difficulty in producing a high-density sintered body, generation of particles during sputtering, reduction in product yield, and poor machinability. [0003] In order to solve the above problems, a combination of BN and SiO 2 A method...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34
CPCC22C38/007C22C38/002C22C38/001C22C2026/003B22F2998/10C22C1/05C22C33/0292C23C14/3414B22F2009/041B22F3/10C22C33/02
Inventor 山本孝充西浦正纮黑濑健太小林弘典宫下敬史松田朋子
Owner TANAKA PRECIOUS METAL IND