Offline optical element installation and adjustment platform and method

Abstract

The invention relates to the technical field of surface shape detection, in particular to an offline optical element installation and adjustment platform and method, and the platform comprises a guide rail, a first rotary table and a second rotary table which are disposed on the guide rail, a prism platform, and a plurality of prisms which are disposed on the prism platform; and a laser and a wavefront sensor; The two rotary tables are used for enabling the laser and the wavefront sensor to rotate to a required angle, and the required angle means that after a laser beam emitted by the laser irradiates one of the prisms P1-Pn and is reflected, the reflected light can be received by the wavefront sensor; The installation and adjustment platform further comprises a processor used for receiving and displaying the wavefront image sent by the wavefront sensor and judging the change condition of the surface type of the optical element according to the wavefront image. The wavefront sensor is used for monitoring the surface type change condition of the surface type of the optical element in the installation process, the installation process is adjusted and optimized in real time, and it can be guaranteed that the original surface type state of the optical element is kept to the maximum degree in the installation process.

Description

technical field [0001] The invention relates to the technical field of surface shape detection, in particular to an off-line optical element assembly and adjustment platform and an adjustment method. Background technique [0002] In the process of laser research and development, it is often necessary to control the laser spectrum (such as laser wavelength and laser linewidth) to meet different application requirements. Taking the excimer laser system as an example, for lithography applications, in order to ensure the fineness of semiconductor silicon wafer chip patterns, the lithography light source is required to have a narrow laser linewidth output. [0003] In the excimer laser, the spectrum control and wavelength selection are generally completed through the line width narrowing module. The method of combining the prism group with the grating is the widely used spectrum control method at present. figure 1 It is a schematic diagram of the basic structure of the linewidt...

AI Technical Summary

Problems solved by technology

The deformation of optical components distorts the laser wavefront, such as figure 2 , causing the beam quality to decrease and the laser linewidth to broaden

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