Evaporation and concentration device for ultra-clean high-purity electronic chemicals and application of evaporation and concentration device

Abstract

The invention discloses an evaporation and concentration device for ultra-clean high-purity electronic chemicals and application of the evaporation and concentration device. The evaporation and concentration device comprises an outer shell, an inner shell, vacuum pumping equipment and a heating assembly, an inner cavity of the outer shell is a first-stage vacuum cavity, an inner cavity of the inner shell is a second-stage vacuum cavity, and the first-stage vacuum cavity and the second-stage vacuum cavity are respectively connected with the vacuum pumping equipment; the inner shell is arranged in the first-stage vacuum cavity, top cover sealing assemblies used for sealing top openings of the first-stage vacuum cavity and the second-stage vacuum cavity are arranged at the tops of the outer shell and the inner shell, and the top cover sealing assemblies are detachably arranged at the tops of the outer shell and the inner shell. The heating end of the heating assembly acts on the inner shell. And a fixing frame for fixing a beaker filled with a sample is arranged in the secondary vacuum cavity. The device realizes evaporation and concentration of ultra-clean high-purity electronic chemicals, and is rapid, efficient and low in maintenance cost.

Description

technical field [0001] The invention relates to a detection device for ultra-clean and high-purity electronic chemicals, in particular to an evaporation and concentration device for ultra-clean and high-purity electronic chemicals and its application. Background technique [0002] With the rapid development of ultra-large-scale integrated circuit technology, the reduction of feature size and the rapid increase of integration, the requirements for the content of metal impurities and other impurities in electronic chemicals and ultra-clean and high-purity solvents used in the electronics industry have become increasingly stringent. [0003] When detecting the metal impurities or other impurity content of ultra-clean high-electronic chemicals, it is sometimes necessary to pre-treat the sample to improve the detection accuracy and improve the detection limit of the method; for example, when using inductively coupled plasma mass spectrometry (ICP -MS) Before testing the sample, s...

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Problems solved by technology

In the prior art, the evaporation and concentration treatment of the pre-testing treatment of electronic chemicals is generally carried out under simple laboratory conditions, but this will introduce metal impurities, dust, particles, etc. contained in the air, resulting in samples being contaminated by Na , K, Mg, Ca and other metal impurities will affect the subsequent test results; if it is carried out in a clean room, although it can avoid the introduction of new impurity pollution, the cost of the clean room is high, the construction period is long, and it requires Certain maintenance costs; in addition, when evaporating and concentrating ultra-clean high-electronic chemicals, corrosive gases may be evaporated. If conventional containers are used for evaporating and concentrating, the inner cavity will be corroded and impurities will be dissolved, which will affect the subsequent Sample Detection Accuracy

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