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Linear variable optical filter and continuous spectrum gas sensor applying same

A filter, variable technology, applied in instruments, scientific instruments, material analysis by optical means, etc., can solve the problems of large size, unsuitable for gas monitoring, bulky, etc., to improve accuracy and improve gas monitoring. Kind of effect

Pending Publication Date: 2022-03-04
SHENZHEN MEISI XIANRUI ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] 2) The mixed gas sensor based on μGC technology has large size and complex system;
[0007] 3) Mixed gas sensor based on FTIR technology, bulky, high cost, not suitable for gas monitoring
[0008] 4) Mixed gas sensors based on NDIR technology usually need to integrate multiple NDIR single-channel gas sensors, or use NDIR multi-channel gas sensors with multiple filters, or use a single gas channel and filter chopper system, Leads to increased sensor size and cost

Method used

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  • Linear variable optical filter and continuous spectrum gas sensor applying same
  • Linear variable optical filter and continuous spectrum gas sensor applying same
  • Linear variable optical filter and continuous spectrum gas sensor applying same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] like figure 1 and 2 As shown, Embodiment 1 of the present invention provides a linear variable optical filter, including a substrate 11, a tapered cavity 12, an oblique Bragg reflection layer 13 and a horizontal Bragg reflection layer 14, and the oblique Bragg reflection layer 13 and the horizontal The Bragg reflection layer 14 is disposed on the upper and lower sides of the tapered cavity 12 , and one side of the substrate 11 is connected to the horizontal Bragg reflection layer 14 .

[0027] like figure 1 and 2 As shown, the horizontal Bragg reflection layer 14 includes a first silicon dioxide layer 141, a first silicon layer 142, a second silicon dioxide layer 143 and a second silicon layer 144, the first silicon dioxide layer 141, the second silicon dioxide layer A silicon layer 142 , a second silicon dioxide layer 143 and a second silicon layer 144 are sequentially deposited on the substrate 11 by physical vapor deposition or chemical vapor deposition.

[0028]...

Embodiment 2

[0033] Taking silicon substrate, 2.5 micron ~ 5 micron variable filter as an example, its manufacturing method includes the following steps:

[0034] S1: cleaning the substrate 11, and ultrasonically cleaning the substrate with acetone, alcohol, and deionized water in sequence;

[0035] S2: Deposit a first silicon dioxide layer 141, a first silicon layer 142, a second silicon dioxide layer 143, and a second silicon layer 144 on the substrate 11 in sequence using physical vapor deposition or chemical vapor deposition technology, the first The thickness of the silicon dioxide layer 141 is 560nm, the thickness of the first silicon layer 142 is 240nm; the thickness of the second silicon dioxide layer 143 is 560nm, and the thickness of the second silicon layer 144 is 240nm;

[0036] S3: using physical vapor deposition or chemical vapor deposition technology to deposit a layer of silicon dioxide with a thickness of 1900 nm on the surface of the second silicon layer 144 in step S2; ...

Embodiment 3

[0043] Embodiment 3 of the present invention provides a continuous spectrum gas sensor, including the linear variable filter 21 described in Embodiment 1, an infrared detector array 22, a sealing cap 23, a base 24 and pins 25, the sealing cap 23 Be arranged on one side of the base 24, the one side of the base 24 is provided with an infrared detector array 22, and the pin 25 is arranged on the other side of the base 24 and is connected with the infrared detector array 22 after passing through the base 24, The linear variable filter 21 is disposed on the cap 23 and directly above the infrared detector array 22 .

[0044] In summary, the present invention realizes linear variable optical filtering by using a single optical filter, and integrates the linear variable optical filter with an array of infrared detectors to realize the monitoring of mixed gas with a single optical filter and a single NDIR gas sensor, reducing the The size of the mixed gas sensor of NDIR technology; due...

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Abstract

The invention discloses a linear variable optical filter and a continuous spectrum gas sensor applying the same, which comprises a substrate, a conical cavity, a horizontal Bragg reflection layer and an inclined Bragg reflection layer, the horizontal Bragg reflection layer and the inclined Bragg reflection layer are arranged on the upper side and the lower side of the conical cavity; and one side of the substrate is connected with the inclined Bragg reflection layer. Linear variable optical filtering is realized by using a single optical filter, the linear variable optical filter and an infrared detector array are integrated, mixed gas is monitored by a single optical filter and a single NDIR gas sensor, and the size of the mixed gas sensor based on the NDIR technology is reduced; due to the adoption of the linear variable optical filter, the proper position of the infrared detection unit can be selected according to the type of gas to be detected, and the gas monitoring type of the mixed gas sensor based on the NDIR technology is improved; the detection results of the plurality of infrared detection units can be selected for comparison through an algorithm technology, so that the accuracy of the mixed gas sensor based on the NDIR technology is improved.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, and in particular relates to a linear variable optical filter and a continuous spectrum gas sensor using the same. Background technique [0002] The NDIR gas monitoring system mainly consists of an air inlet, an air outlet, an infrared gas detector signal processing circuit, an infrared light source circuit, a gas chamber, an infrared light source, and an infrared gas detector. The infrared gas sensor is composed of a filter, an infrared detector, a casing and a base. The infrared rays are generated by the infrared light source, pass through the gas chamber and optical filter, and shoot to the infrared detector. According to the Beer-Lambert law, the gas in the gas chamber will absorb light of different wavelengths depending on the gas type, and the gas type and concentration can be determined by measuring the attenuated wavelength. Filters, on the other hand, are designed to eliminate ligh...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/3504
CPCG01N21/01G01N21/3504
Inventor 武斌宏宇
Owner SHENZHEN MEISI XIANRUI ELECTRONICS CO LTD