Binding method of graphite rotating target material

Abstract

The invention discloses a binding method of a graphite rotating target material, and relates to the technical field of magnetron sputtering coating rotating target material binding. The method comprises the following steps: uniformly coating a layer of heat-conducting glue on the outer wall of a stainless steel liner tube; then, a piece of graphite paper with the thickness of 0.3 mm is placed on a horizontal workbench, and a copper mesh with the mesh size of 80-120 meshes is placed on the graphite paper; uniformly brushing a layer of heat-conducting glue on the copper mesh, integrally binding the graphite paper and the copper mesh on the stainless steel liner tube, fixedly rotating after the graphite paper and the copper mesh are firmly bound on the stainless steel liner tube, coating a layer of heat-conducting glue on the outer wall of the graphite paper, and fully coating a layer of heat-conducting glue on the inner wall of the graphite tube sleeve target material; finally, the graphite tube sleeve target material is screwed into the stainless steel liner tube bound with the graphite paper and the copper net; a whole target material binding mode is adopted, the binding work of the long-size target material can be simply and efficiently completed, and the attaching quality of the obtained product target material and a binding liner tube is good; the cost is low, and high-temperature heating operation is not needed.

Description

Technical field [0001] The present invention belongs to the technical field of magnetron sputtering plating film rotation target, and in particular, the present invention relates to a binding method of a graphite rotating target. Background technique [0002] The existing process in the market is combined with the form of the graphite casing. Specifically, the back tube uses a copper back tube, and the veins are threaded; the graphite tube is divided into multi-stage graphite casing, each seam sleeve inner wall The car is internally threaded; then the multi-segment graphite casing is then completed in a copper back tube. [0003] Its characteristics are: the operation is simple, the technical content is low, and the inner and external thread is fitted. The copper back tube and graphite casing have a poor problem. The screw processing deviation can also cause poor fitting, leading to poor thermal conductivity, graphite target The tube is prone to the surface of the target surface ...

AI Technical Summary

Problems solved by technology

[0007] In the above-mentioned patents, the segmented binding method is adopted. The larger the length of the single segment of the rotating target, the smaller the wall thickness, the less controllable the uniformity and quality of the binding, the higher the requirements for the operation of the staff, and the complex structure and high cost

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