Preparation method of amorphous carbon film

An amorphous carbon film and substrate technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as inability to effectively filter out blue light and difficulty in protecting human eyes, and reduce eye discomfort Effect

Pending Publication Date: 2022-03-25
ZHEJIANG UNIV HANGZHOU GLOBAL SCI & TECH INNOVATION CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the blocking efficiency of the anti-blue light screen for blue light with a wavelength exceeding 420nm does not exceed about 40%, so it cannot effectively filter out blue light, and it is difficult to protect human eyes

Method used

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  • Preparation method of amorphous carbon film

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] A kind of preparation of amorphous carbon film:

[0022] Place the 2mm thick glass slide substrate in RF-PECVD equipment (such as figure 1 (shown) on the lower electrode plate in the reaction chamber, turn on the vacuum pump, evacuate the reaction chamber to a pressure of 0.8 Torr, heat the substrate to 50°C, and then flow the precursor gas from the air inlet at a flow rate of 20 sccm and 20 sccm Mix benzonitrile and VSZ, use 10 sccm argon as the carrier gas, and perform vapor deposition on the carrier slide under the power of the radio frequency generator of 50W to obtain an amorphous carbon film with anti-blue light.

Embodiment 2

[0024] A kind of preparation of amorphous carbon film:

[0025] Place the 2mm thick glass slide substrate in RF-PECVD equipment (such as figure 1 (shown) on the lower electrode plate in the reaction chamber, turn on the vacuum pump, evacuate the reaction chamber to a pressure of 0.8Torr, heat the substrate to 120°C, and then flow the precursor gas from the air inlet at a flow rate of 20sccm and 20sccm Mix benzonitrile and VSZ, use 10sccm argon as the carrier gas, and perform vapor deposition on a glass slide under the power of a radio frequency generator of 50W to obtain a blue-reflective amorphous carbon film.

Embodiment 3

[0027] A kind of preparation of amorphous carbon film:

[0028] Place the 2mm thick glass slide substrate in RF-PECVD equipment (such as figure 1 (shown) on the lower electrode plate in the reaction chamber, turn on the vacuum pump, evacuate the reaction chamber to a pressure of 0.8Torr, heat the substrate to 200°C, and then flow the precursor gas from the air inlet at a flow rate of 20sccm and 20sccm Mix benzonitrile and VSZ, use 10sccm argon as the carrier gas, and perform vapor deposition on a glass slide under the power of a radio frequency generator of 50W to obtain a blue-reflective amorphous carbon film.

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Abstract

The invention provides a preparation method of an amorphous carbon film, and relates to the technical field of functional coating material preparation. The preparation method of the amorphous carbon film mainly comprises the following steps: heating a base material in vacuum, mixing a compound with a C = N group with 1, 3, 5-trimethyl-1, 3, 5-trivinyl-cyclotrisilazane to prepare a precursor gas, and carrying out vapor deposition on the base material through a radio frequency generator together with a carrier gas. The defects in the prior art are overcome, the amorphous carbon film containing the C = N group is prepared, the characteristic that the C = N group has the highest absorbance at the wavelength of 300 nm is utilized, the excellent anti-blue-light effect is achieved, and the film has the advantages of being high in transmittance, abrasion resistance, chemical corrosion resistance, thermal conductivity and the like within the wavelength range of visible light and infrared light.

Description

technical field [0001] The invention relates to the technical field of preparation of functional coating materials, in particular to a preparation method of an amorphous carbon film. Background technique [0002] In the visible wavelength range of 380nm to 780nm that the human eye can perceive, generally speaking, the shorter the wavelength, the stronger the energy, which is usually more harmful to the human eye. Among them, blue light with a wavelength of 380nm to 500nm is called high-energy visible blue light. Eye damage is the greatest. [0003] With the development of semiconductor technology, many electronic products use light-emitting diodes or organic light-emitting diodes as background light sources. These light-emitting diodes or organic light-emitting diodes emit blue light with a wavelength between 420 and 480nm, which has caused great damage to human eye health. threaten. Therefore, various anti-blue light screens have appeared on the market, hoping to protect ...

Claims

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Application Information

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IPC IPC(8): C23C16/26C23C16/505
CPCC23C16/26C23C16/505
Inventor 吴春春杨挺王涛张云飞
Owner ZHEJIANG UNIV HANGZHOU GLOBAL SCI & TECH INNOVATION CENT
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