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Magnetic cantilever beam sensor, manufacturing method thereof, measuring device and imaging system

A cantilever beam and sensor technology, applied in the sensor field, can solve the problems of high configuration requirements, limited test sample types, and detection sensitivity to be improved, etc., to achieve the effect of improving spatial resolution and improving detection sensitivity.

Active Publication Date: 2022-03-29
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, when the current magnetic micro-cantilever sensor is used to test the internal free radical concentration of the sample to be tested, there are generally high configuration requirements. type; and the detection sensitivity needs to be improved

Method used

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  • Magnetic cantilever beam sensor, manufacturing method thereof, measuring device and imaging system
  • Magnetic cantilever beam sensor, manufacturing method thereof, measuring device and imaging system
  • Magnetic cantilever beam sensor, manufacturing method thereof, measuring device and imaging system

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Embodiment Construction

[0038] Embodiments of the present invention will be described in detail below. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0039] It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, connection may be for both a fixed function and a circuit / signal communication function.

[0040] It is to be understood that the terms "length", "width", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships sh...

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Abstract

A magnetic cantilever beam sensor disclosed by the present invention comprises a glass substrate, a silicon-based cover, a silicon-based cantilever beam and a magnetic ball, a first surface of the glass substrate is provided with a first cavity, and a first surface of the silicon-based cover is provided with a second cavity. The first surface of the glass substrate and the first surface of the silicon-based cover are oppositely attached and are subjected to vacuum hot-pressing packaging, so that the silicon-based cantilever beam and the magnetic ball are positioned in a vacuum chamber formed by combining the first cavity and the second cavity; the first surface of the glass substrate and the first surface of the silicon-based cover are respectively plated with a metal layer formed by the same metal material at the joint of the first surface of the glass substrate and the first surface of the silicon-based cover, the root part of the silicon-based cantilever beam is fixedly connected to the first surface of the glass substrate, and the magnetic ball is fixedly connected to the cantilever end of the silicon-based cantilever beam. The invention further discloses a manufacturing method of the magnetic cantilever beam sensor and a related measuring device and imaging system. The detection sensitivity of the magnetic cantilever beam sensor is greatly improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a magnetic cantilever beam sensor, a manufacturing method thereof, a related measuring device, and an imaging system. Background technique [0002] Magnetic resonance imaging (Magnetic Resonant Imaging), as a powerful technique to obtain three-dimensional information inside the human body without trauma, has been widely used in the field of biomedicine. Since the magnetic resonance imaging system is based on the working principle of coil induction detection technology, its spatial resolution is usually limited within tens of microns. In order to further improve the spatial resolution of the magnetic resonance technology to the nanometer level, the application of the magnetic resonance force microscope (Magnetic Resonant Force Microscope) combined with the atomic force microscope (Atomic Force Microscope) was born. Cantilever sensors capable of detecting free radicals or electron...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/022G01R33/48G01Q60/24G01N24/08B81C1/00
CPCG01R33/022G01R33/48G01Q60/24G01N24/082B81C1/0015
Inventor 薛高鹏李星辉王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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