Laser processing device for functional structure of inner surface of deep cavity

Abstract

The invention belongs to the technical field of laser processing, and particularly relates to a laser processing device for a functional structure of the inner surface of a deep cavity. The device comprises a laser used for generating a laser beam, the laser beam is used for machining the inner surface of a deep cavity of a workpiece to be machined, and a functional structure is formed on the inner surface of the deep cavity of the workpiece to be machined; the X-axis guide rail, the two Y-axis guide rails and the Z-axis guide rail are used for enabling laser beams emitted by the laser to be aligned to the inner surface of the deep cavity of the workpiece to be machined; a workpiece to be machined is located on the lower portion of the laser and fixed to the side face of the machining platform through a positioning clamp. According to the device, the gantry type three-dimensional machine tool framework is adopted and matched with the laser device and the positioning clamp, laser machining of an electromagnetic function structure on the inner surface of the large deep-cavity workpiece can be achieved, the three-dimensional machine tool framework guarantees the large machining range, and the working platform and the positioning clamp can guarantee accurate positioning of the workpiece to be machined; the three-axis guide rail can drive the laser to accurately move to the to-be-machined position of the workpiece, and the machining quality is optimized.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and in particular relates to a laser processing device with a functional structure on the inner surface of a deep cavity. Background technique [0002] The electromagnetic functional structure is a periodic structure composed of one or more layers of metal patches or apertures attached to the surface of the substrate medium. The electromagnetic functional structure is divided into two types: aperture type and patch type. When the electromagnetic functional structure is on the surface, part of the energy of the incident wave will excite the electron movement to generate an inductive current and be consumed, and part will be transmitted. This effect will be called the resonance effect. Due to its filtering characteristics, the electromagnetic functional structure can be used as a spatial filter And frequency selectors, etc., the resonant frequency band is greatly affected by the size of th...

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Problems solved by technology

[0002] The electromagnetic functional structure is a periodic structure composed of one or more layers of metal patches or apertures attached to the surface of the substrate medium. The electromagnetic functional structure is divided into two types: aperture type and patch type. When the electromagnetic functional structure is on the surface, part of the energy of the incident wave will excite the electron movement to generate an inductive current and be consumed, and part will be transmitted. This effect will be called the resonance effect. Due to its filtering characteristics, the electromagnetic functional structure can be used as a spatial filter And frequency selector, etc., its resonant frequency band is greatly affected by the size of the electromagnetic functional structural unit, and the deviation of the size will cause the filter to fail

[0003] At present, the formation of the electromagnetic functional structure is mainly to attach a layer of micron-scale dielectric layer on the outer surface of the workpiece, and then make the desired electromagnetic functional structure on the dielectric layer through the manufacturing method. The manufacturing methods are mainly divided into flexible screen transfer and direct manufacturing. Among them, the direct production category mainly includes CNC milling aperture type electromagnetic function structure surface and laser etching processing aperture type electromagnetic function structure surface. The workpiece in the CNC milling method is seriously stressed, easy to vibrate and damage the workpiece, and the above methods have not yet achieved deep For the processing of functional structures on the inner surface of deep cavities, the laser etching method has no force, good stability and high efficiency, and is widely used in the manufacture of aperture-type electromagnetic functional structures

[0004] With continuous development, the manufacture of electromagnetic functional structures on the inner surface of deep cavities has gradually become a trend. Deep cavities are wide at the top and narrow at the bottom, with large radial dimensions, thin walls, and an angle between the inner centerline and the side wall of 10° to 25°. There are many difficulties in laser processing of the electromagnetic functional structure of the inner surface of the deep cavity: First, the vertical distance that needs to be processed in the deep cavity is very deep, and the laser head cannot be inserted into the deep cavity for processing

Second, the processing range of the existing laser processing equipment is very small, and it is impossible to effectively position and clamp the workpiece and accurately locate the position of the area to be processed

Third, it is impossible to observe the processing quality in real time, and cannot effectively adjust the processing parameters

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