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Nondestructive testing and evaluation method for strong laser damage characteristics of optical element

A technology for optical components and non-destructive testing, applied in neural learning methods, optical testing of flaws/defects, material analysis through optical means, etc., can solve the problems of long laser damage testing cycle, unrepeatable testing, and high testing costs Evaluate device reliability, improve system reliability and availability, and improve the effect of processing technology

Pending Publication Date: 2022-04-12
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problems of long laser damage test cycle of optical components, high test cost, and unrepeatable test, and the problem that a single non-destructive testing parameter cannot fully reflect the damage of optical components under specific laser parameters. The patent of the present invention proposes A method for non-destructive testing and evaluation of strong laser damage characteristics of optical components, aimed at realizing non-destructive testing and evaluation of optical component damage characteristics, thereby reducing the risk of using optical components, especially large-diameter optical components, and improving the reliability of laser systems

Method used

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  • Nondestructive testing and evaluation method for strong laser damage characteristics of optical element
  • Nondestructive testing and evaluation method for strong laser damage characteristics of optical element
  • Nondestructive testing and evaluation method for strong laser damage characteristics of optical element

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Embodiment 1

[0067] Embodiment 1 Acquisition of non-destructive testing parameter data of prior optical components

[0068] like figure 2 As shown, using spectrophotometer, absorption coefficient tester, stimulated fluorescence tester, roughness meter, refractive index tester, surface curvature tester according to figure 2 In the manner shown, the transmittance, absorption, stimulated fluorescence, roughness, refractive index, surface curvature distribution, etc. are obtained by point-by-point scanning. During the point-by-point scanning process, the coordinate position of the scanning area relative to the optical element should be recorded and the measured value should be entered into the corresponding position. like figure 2 As shown, when the measurement area is large and the measurement value in the measurement area is relatively stable, all the values ​​of the parameter in the area can be replaced by the measurement value, such as figure 2 In , the black dots represent the meas...

Embodiment 2

[0074] Embodiment 2 Acquisition of prior optical element damage detection parameter data

[0075] The principle diagram of the optical element lossy test data acquisition process in the present invention refers to the appended image 3 , the destructive test data testing system includes: testing laser light source 1, energy attenuation system 2, focusing system 3, laser parameter measurement system 4, optical component sample 5, damage diagnosis system 6, auxiliary moving system 7, energy absorption device 8, computer control system9. The auxiliary moving system adjusts the position of the optical element sample 5 . In addition to obtaining the laser parameter distribution data, the laser parameter measurement system 4 also has the function of calibrating the positional relationship of the laser beam and the coordinate system of the optical element, calibrating the characteristic position of the laser beam through the light, and calculating the relationship between the laser b...

Embodiment 3

[0089] Embodiment 3 Convolutional Neural Network Calculation LIDRM

[0090] On the basis of Embodiment 1 and Embodiment 2, the relationship model LIDRM (Laser Induced Damage Relationship Model) between the prior nondestructive inspection data and the prior destructive inspection data is obtained by analyzing the prior optical element surface inspection data. For details, please refer to the attached Figure 4 .

[0091] The convolutional network is randomly generated, and the convolutional neural network includes at least an input layer, a hidden layer, and an output layer. In this embodiment, a multi-layer neural network is used.

[0092] Randomly select n original data matrices Data_n(u, v) in the data set, and add them to the random bias matrix B after convolving with multiple randomly generated convolution kernels W to generate multiple FeatureMaps, which are activated by activation functions (such as , sigmaio function or Relu function) into the next network layer. Th...

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Abstract

The invention discloses a nondestructive testing and evaluation method for the strong laser damage characteristic of an optical element, and aims to solve the problem that the laser damage characteristic of the optical element cannot be evaluated through nondestructive testing in the prior art. The method comprises the following steps: obtaining nondestructive testing data of the optical element and laser parameters of damage under the action of strong laser through an experiment; taking the nondestructive testing data and the damage testing result as characteristic quantities, and obtaining a detection evaluation model of the laser damage characteristics of the optical element by using a deep learning method according to the nondestructive testing data, the laser parameters and the damage testing result; and carrying out nondestructive testing on the optical element to be detected, and taking obtained nondestructive testing data and laser parameters as input quantities of the detection evaluation model so as to obtain a laser damage characteristic detection result of the optical element and realize nondestructive testing and evaluation of strong laser damage characteristics.

Description

technical field [0001] The invention relates to the field of damage characteristic detection of optical components, in particular to a nondestructive detection and evaluation method for strong laser damage characteristics of optical components. Background technique [0002] Optical components will undergo laser-induced damage under the action of lasers, especially high-power / high-energy lasers. The existing direct evaluation method is a destructive test method, and the representative technologies include prior technology 1, ISO 21254 (part1~part4), Lasersand laser- related equipment–Test methods for laser-induced damage threshold and prior art 2, OPTICS EXPRESS Vol.22, No.23 (2014), Damage modeling and statistical analysis of optics damage pertableance in MJ-class laser systems. Since the output capability of the laser is limited by the damage of the optical element, prior art 1 uses the method of focusing to increase the irradiance flux on the surface of the optical element...

Claims

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Application Information

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IPC IPC(8): G01N21/84G01N21/88G06N3/04G06N3/08
Inventor 巴荣声李杰周信达丁磊郑垠波徐宏磊唐晓东
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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