Spin coater with light path

Abstract

The spin coater with the light path comprises a spin coater body, the spin coater body comprises a first machine base, a second machine and a film coating working base, a light path and gas path multipurpose rotating mechanism is arranged in the second machine base, a light source assembly is arranged at the top of an inner cavity of the first machine base, and an exhaust pipe is arranged at the bottom of a working cavity in the film coating working base. According to the invention, dynamic changes of an absorption spectrum, a fluorescence spectrum and a reflection spectrum in a spin-coating process can be realized, and the device is used for tracking material phase change in solvent volatilization, solvent annealing and thermal annealing processes, and has advantages in tracking detection of chemical reaction kinetics and biochemical processes; the exhaust pump enables the exhaust pipe to carry out air exhaust work through the multiple symmetrically-arranged air guide pipes, due to the fact that the annular exhaust notch is formed in the top of the exhaust pipe base, and the exhaust pipe and the working cavity of the film coating working base are coaxially arranged, in the exhaust process, exhaust is even, airflow turbulence is not generated, and the film coating precision on the substrate is guaranteed.

Description

technical field [0001] The invention relates to the technical field of glue homogenizers, in particular to a glue homogenizer with an optical path. Background technique [0002] Perovskite and organic semiconductor thin films are widely used in light-emitting panels, photovoltaics, semiconductor transistors and other fields. These thin films are mainly realized by solution spin coating, doctor blade coating, screen printing, and slit coating. machine for production. In the process of solvent volatilization, the material undergoes a phase transition from solution state to thin film solid state. At the same time, the optical properties of the material, including fluorescence spectral characteristics, absorption spectral characteristics, and reflective spectral characteristics, will change with the volatilization of the solvent, while the traditional The homogenizer usually can only realize the production of organic semiconductor thin films, but cannot study the optical proper...

AI Technical Summary

Problems solved by technology

In the process of solvent volatilization, the material undergoes a phase transition from solution state to thin film solid state. At the same time, the optical properties of the material, including fluorescence spectral characteristics, absorption spectral characteristics, and reflective spectral characteristics, will change with the volatilization of the solvent, while the traditional The homogenizer usually only realizes the production of organic semiconductor thin films, but cannot conduct research on the optical properties of materials during the formation of organic semiconductor thin films.

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