Extensible precision source meter

A scalable and precise technology, applied in the field of scalable precision source meters, can solve problems such as inability to achieve high voltage and high current output, poor load adaptability, and poor scalability, so as to improve test efficiency and realize high voltage and load adaptability Good results

Inactive Publication Date: 2022-04-22
STELIGHT INSTR CO LTD
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a scalable precision source meter, which overcomes the inability to achieve high voltage and high current output, poor scalability, and poor load adaptability in the prior art, and in some Unacceptable technical problems such as the output is easy to oscillate under certain load conditions, and the voltage cannot be stabilized

Method used

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Embodiment

[0042] Embodiment: a scalable precision source meter, comprising: a power supply unit 23, an external interface unit 24, a main power path unit 25, an analog control module unit 26 located between the external interface unit 24 and the main power path unit 25, connected The power supply unit 23 to the main power path unit 25 is used to supply power to the external interface unit 24 and the analog control module unit 26;

[0043] The external interface unit further includes:

[0044] The input and output interface 8 is used to receive parameter status configuration information, target current and voltage values ​​and monitoring information from peripherals;

[0045] The main controller 10, located between the input and output interface 8 and the main control chip FPGA13, is used to convert the input command into a digital control command signal according to the protocol and transmit the actual voltage and current value information from the main control chip FPGA13 to the input an...

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Abstract

The invention discloses an extensible precision source meter which comprises a power supply unit, an external interface unit, a main power path unit and an analog control module unit located between the external interface unit and the main power path unit. The analog control module unit further comprises an FPGA (Field Programmable Gate Array) main controller, a voltage digital-to-analog converter, a current digital-to-analog converter, a current feedback circuit, a voltage sampling and feedback circuit, a first error amplifier, a second error amplifier and an MOS (Metal Oxide Semiconductor) driving module; the amplifier is used for amplifying a voltage error signal from the first error amplifier and a current error signal from the second error amplifier; and the buffer driving circuit is positioned between the MOS driving module and the output regulator. The extensible precision source meter overcomes the unacceptable technical problems that in the prior art, high-voltage and large-current output cannot be achieved, expandability is poor, load adaptability is poor, output is prone to oscillation under certain load conditions, and voltage stabilization cannot be achieved.

Description

technical field [0001] The invention relates to a scalable precision source meter, which belongs to the technical field of DC test and measurement. Background technique [0002] The precision source meter is a precise DC test and measurement technology equipment integrating four-quadrant power supply, pulse source, ammeter and voltmeter. The equipment has high stability, low noise, small time drift and temperature drift, and is mostly used in the research and development and testing of semiconductor devices, and the research and testing of emerging materials. [0003] The source meter is the necessary equipment for testing and verification of modern semiconductor devices, and the research and development and manufacturing technology of high-end source meters have been mastered by professional instrument manufacturers in the United States and Japan. Due to the blockade, domestic enterprises are currently unable to make source meters of corresponding specifications, and at th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26G01R19/25
CPCG01R31/2601G01R19/25
Inventor 潘朝松胡海洋黄建军
Owner STELIGHT INSTR CO LTD
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