Planar optical flat calibrating device and calibrating method

Abstract

The invention discloses a planar optical flat calibrating device and method. The planar optical flat calibrating device comprises a detected optical flat, a standard optical flat is arranged at the bottom of the detected optical flat, a collimator objective is arranged at the top of the detected optical flat, a baffle is arranged on the upper left portion of the collimator objective, a small hole is formed in the baffle, and optical fiber laser is arranged on the side face of the baffle. A first reflector is arranged on the right side of the baffle, a second reflector is arranged right above the collimator objective, a spectroscope is arranged in front of the laser of the fiber laser, and a CCD camera is arranged on the right side of the spectroscope; according to the invention, a plane equal-thickness interference method is adopted, the interference pattern of the detected optical flat and the standard optical flat is acquired through the camera, and a planeness algorithm established by itself is adopted, so that the detection of the detected optical flat is completed, the planeness of a plurality of detected optical flat can be detected in parallel, and the detection efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of plane flat crystal verification, in particular to a plane flat crystal verification device and a verification method. Background technique [0002] As we all know, the flatness test optical plane flat crystal is an auxiliary device used in the process of industrial production and processing to detect the flatness of the plane of parts and improve product quality. It has been widely used in the technical field of flatness testing equipment , Parallel flat crystals are common tools used to measure block gauges by interferometry, and to test the bonding and flatness of block gauges, gauges, sealing surfaces of parts, measuring instruments and measuring tools. [0003] The traditional flat crystal calibrator uses sodium lamp, the monochromaticity is poor, the contrast of the interference fringes is not obvious enough, and it needs a long warm-up time when used; when observing, use the moving micrometer to rea...

AI Technical Summary

Problems solved by technology

[0003] The traditional flat crystal calibrator uses sodium lamp, the monochromaticity is poor, the contrast of the interference fringes is not obvious enough, and it needs a long warm-up time when used; when observing, use the moving micrometer to read the interference fringe spacing and interference fringe bending The measurement error will be caused by human eye observation and manual operation, which will affect the accuracy of the result; at the same time, the flat crystal calibrator can only complete the verification of a single measured flat crystal, resulting in a decrease in the efficiency of the flat crystal calibrator

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