Metastable state inert gas atomic beam detection method and system
A technology of inert gas and atomic beam, applied in the field of metastable inert gas atomic beam detection method and system, can solve the problems of unfavorable use of lenses, high price, high requirements, etc., and achieve easy portability and assembly, simple structure and low cost low effect
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[0034] A metastable noble gas atomic beam detection method, comprising the following steps:
[0035] Step 1: place a wire mesh downstream of the metastable inert gas atom beam, the metastable inert gas atoms collide with the surface of the wire mesh, de-excited to generate secondary electrons;
[0036] Step 2: De-excited electrons are focused on the microchannel plate detector under the action of the electron lens electric field;
[0037] Step 3: The microchannel plate detector will multiply the de-excited electrons and image them on the fluorescent screen;
[0038] Step 4: The image acquisition device captures the image of the phosphor screen, and through image information processing, the beam intensity and spatial distribution parameters of the metastable noble gas atomic beam are obtained.
[0039] In the above step 4, the image acquisition device may be a CCD.
[0040] In the above step 1, the atomic transmittance of the metal wire mesh is 40%-70%. The atomic transmitta...
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