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Compact time-of-flight mass spectrometer

A technology of time-of-flight mass spectrometry and optical devices, applied in the field of compact time-of-flight mass spectrometers, can solve the problems of expensive and large time-of-flight mass spectrometers

Pending Publication Date: 2022-06-24
SPACETEK TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, time-of-flight mass spectrometers are typically large and expensive instruments that can only be found in high-end laboratories, not on-line in industrial manufacturing equipment for process control, so the compact size is important to allow their inline integration to industrial manufacturing equipment. important

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  • Compact time-of-flight mass spectrometer
  • Compact time-of-flight mass spectrometer
  • Compact time-of-flight mass spectrometer

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Embodiment Construction

[0028] The present invention relates to ion optics for time-of-flight mass spectrometers that improve the manufacturability and performance of time-of-flight mass spectrometers, especially when compact instruments are of interest. In addition, it discloses a method of coupling an ion source originally designed for quadrupole matter analyzers with a time-of-flight mass spectrometer, which makes it very easy to replace the slow time-of-flight mass spectrometers used in industrial process control with new fast time-of-flight mass spectrometers. Fast quadrupole material analyzers with minimal changes to the existing interface between these measuring instruments and the industrial manufacturing equipment they interface with. All these features allow the use of fast time-of-flight mass spectrometers in industrial fields where only quadrupole mass spectrometers were previously used, opening new avenues for faster and more sensitive process and product species control in various fields...

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Abstract

An accelerating electrode set for accelerating charged particles in a vacuum ion optical system wherein each accelerating electrode comprises a conical portion and at least one elongate leg projecting from the conical portion, the elongate leg and any other elongate leg are both configured as an electrical connection and mechanical support between the conical portion and an intended source of electrical potential.

Description

technical field [0001] The present invention relates to a compact time-of-flight mass spectrometer for use in a mass spectrometer for determining the chemical composition of a liquid or gas. Background technique [0002] In many areas of industrial applications, there is a need to measure the chemical composition of substances in liquid or gaseous form with compact devices that can be integrated inline with production equipment or infrastructure. For example, coating processes used to fabricate semiconductors, optical devices, and displays require accurate process control, which can be delivered to the substrate in a vacuum deposition process by measuring at high rates (eg, every fraction of a second) the composition of the gas to achieve. [0003] Mass spectrometers are high-performance instruments commonly used in laboratories to determine the chemical composition of gases or liquids. A mass spectrometer is "an instrument that separates an ion beam according to the quoti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J49/06H01J49/02H01J49/40H05K3/34
CPCH01J49/068H01J49/022H01J49/401H05K1/0233H05K1/181H05K2201/09072H05K2201/10151
Inventor 尤尔格·乔斯特卢卡斯·霍弗
Owner SPACETEK TECH AG